MKS 901P-11130-0167 真空压力传感器 PDF资料
1.产 品 资 料 介 绍：
MKS 901P-11130-0167 是MKS公司901P系列的一款复合式真空压力传感器，采用MicroPirani和压电差压双传感技术。
产品特点
采用MicroPirani和压电差压双传感器技术，测量范围宽。
单颗传感器可替代传统三个独立传感器的功能。
提供绝压和差压两种测量模式。
数字接口支持RS232和RS485协议。
模拟输出为1至9 VDC，1 VDC/decade。
最多可配三个机械式SPDT继电器，用于过程控制或联锁。
采用MEMS硅芯片技术，体积小，可任意方向安装。
压电传感器精度达±0.1%满量程。
供电电压9至30 VDC，功耗低于1.2W。
重量仅170g，结构非常紧凑。
应用领域
半导体设备的真空负载锁定腔体压力监测。
真空泵抽气循环过程中的压力测量和控制。
隔离阀和真空泵的联锁保护控制。
分析仪器和科研设备的真空系统压力监测。
需要替代多个真空计、节省空间的OEM设备。
结尾
总之，MKS 901P-11130-0167 是一款宽量程、高集成度的真空压力传感器，适用于半导体、分析仪器及紧凑型真空系统。选型时需确认接口和通信方式与设备匹配。
MKS 901P-11130-0167 真空压力传感器 英文介绍
MKS 901P-11130-0167 is a composite vacuum pressure sensor of MKS 901P series, which adopts MicroPirani and piezoelectric differential pressure dual sensing technology.
Product Features
Adopting MicroPirani and piezoelectric differential pressure dual sensor technology, the measurement range is wide.
A single sensor can replace the function of traditional three independent sensors.
Provide two measurement modes: absolute pressure and differential pressure.
The digital interface supports RS232 and RS485 protocols.
The analog output is 1 to 9 VDC, 1 VDC/cascade.
Up to three mechanical SPDT relays can be equipped for process control or interlocking.
Adopting MEMS silicon chip technology, it has a small size and can be installed in any direction.
The accuracy of the piezoelectric sensor reaches ± 0.1% of the full range.
The power supply voltage is 9 to 30 VDC, and the power consumption is less than 1.2W.
Weighing only 170g, the structure is very compact.
Application Domain
Vacuum load lock chamber pressure monitoring for semiconductor equipment.
Pressure measurement and control during the vacuum pump pumping cycle.
Interlock protection control of isolation valve and vacuum pump.
Vacuum system pressure monitoring for analytical instruments and scientific research equipment.
Need to replace multiple vacuum gauges and save space with OEM equipment.
ending
In summary, MKS 901P-11130-0167 is a wide range, highly integrated vacuum pressure sensor suitable for semiconductors, analytical instruments, and compact vacuum systems. When selecting, it is necessary to confirm that the interface and communication method match the equipment.
MKS 901P-11130-0167 真空压力传感器 产品图片
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