Varian E111082T0 气动接口模块 PDF资料
1.产 品 资 料 介 绍：
Varian E111082T0 是Varian真空泵系统配套的气动接口模块，用于控制气动阀门。
产品特点
用于Varian真空泵系统的气动阀门控制。
主要连接通入阀门或吹扫阀门。
需配合泵的控制接口使用。
由控制器供电和传输控制信号。
适用惰性气体，用于泵的放气或轴承保护。
供气压力需低于2 bar。
结构紧凑，适配Varian标准接口。
适用于高真空和超高真空环境。
材质和密封符合真空应用要求。
属于真空系统配套附件。
应用领域
涡轮分子泵系统的通入阀控制。
真空系统的吹扫保护。
分析仪器的真空系统。
半导体制造设备的真空工艺。
超高真空系统的辅助控制。
结尾
总之，Varian E111082T0 是Varian真空泵系统的气动阀门控制附件。选型时需确认与具体泵型号和控制器的兼容性。
Varian E111082T0 is a pneumatic interface module used to control pneumatic valves in conjunction with Varian vacuum pump systems.
Product Features
Pneumatic valve control for Varian vacuum pump system.
Mainly connected to inlet valves or purge valves.
It needs to be used in conjunction with the control interface of the pump.
Powered by the controller and transmitting control signals.
Suitable for inert gas, used for pump venting or bearing protection.
The gas supply pressure should be below 2 bar.
Compact structure, compatible with Varian standard interface.
Suitable for high vacuum and ultra-high vacuum environments.
The material and sealing meet the requirements for vacuum applications.
Belongs to vacuum system accessories.
Application Domain
Control of inlet valve for turbomolecular pump system.
Vacuum system blowing protection.
Vacuum system for analytical instruments.
Vacuum process for semiconductor manufacturing equipment.
Auxiliary control of ultra-high vacuum system.
ending
In summary, Varian E111082T0 is a pneumatic valve control accessory for Varian vacuum pump systems. When selecting, it is necessary to confirm compatibility with the specific pump model and controller.
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