MKS 153F-16205 智能控制器 PDF资料
1.产 品 资 料 介 绍：
MKS 153F-16205智能控制器是MKS Instruments公司的一款集成式下游压力控制设备，内置节流阀与驱动电路。
15条特点：
该型号（153F-16205）内置节流阀和控制电路。
无需外接控制器箱体，一体化设计。
支持压力控制和位置控制两种模式。
采用PID控制算法，调节响应快。
可通过模拟电压信号或RS-232命令控制。
内置拨码开关，参数配置方便。
单路DC供电即可工作，功耗低。
断电自动保存参数，重新上电即恢复。
顶部配有手动操作开关，便于调试。
适用于真空系统的压力精确控制。
工作温度范围15°C至50°C。
线缆良好接地时符合CE标准。
可选配多种法兰接口。
该型号在半导体真空设备中应用较多。
适合设备维护和系统升级场景。
结尾：
MKS 153F-16205智能控制器功能集成度高、控制灵活，是真空压力控制的实用选择。使用前按实际工况调整PID参数即可。
MKS 153F-16205 智能控制器 英文介绍
The MKS 153F-16205 intelligent controller is an integrated downstream pressure control device from MKS Instruments, equipped with a built-in throttle valve and drive circuit.
15 characteristics:
This model (153F-16205) has a built-in throttle valve and control circuit.
No need for an external controller enclosure, integrated design.
Supports two modes: pressure control and position control.
Adopting PID control algorithm, the adjustment response is fast.
It can be controlled through analog voltage signals or RS-232 commands.
Built in dip switch, convenient parameter configuration.
It can work with a single DC power supply and has low power consumption.
Power off automatically saves parameters, and when powered on again, it will be restored.
The top is equipped with a manual operation switch for easy debugging.
Suitable for precise pressure control in vacuum systems.
The working temperature range is 15 ° C to 50 ° C.
When the cable is well grounded, it complies with CE standards.
Multiple flange interfaces can be optionally selected.
This model is widely used in semiconductor vacuum equipment.
Suitable for equipment maintenance and system upgrade scenarios.
ending:
The MKS 153F-16205 intelligent controller has high functional integration and flexible control, making it a practical choice for vacuum pressure control. Adjust the PID parameters according to the actual working conditions before use.
MKS 153F-16205 智能控制器 产品图片
3.其他产品
GE ESP10B 压力和流量控制器
GE ESM10A 以太网通讯模块
A-B 1756-OW16I/A 通道离散输出模块
1C31222G01 analog output module
BENTLY 3500/42M 176449-02 speed monitor
MERAK 681H10078 681K10078 681K10079 Card
| AMAT 0190-09267 | AMAT 0190-08911 | AMAT 0190-08853 |
| AMAT 0190-09267 | AMAT 0190-08922 | AMAT 0190-08855 |
| AMAT 0190-09134 | AMAT 0190-08931 | AMAT 0190-08856 |
| AMAT 0190-09139 | AMAT 0190-08964 | AMAT 0190-08858 |
| AMAT 0190-09141 | AMAT 0190-08965 | AMAT 0190-08858 |
| AMAT 0190-09153 | AMAT 0190-09009 | AMAT 0190-08875 |
| AMAT 0190-09160 | AMAT 0190-09009 | AMAT 0190-08911 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidc
