DAIHEN SVD-002-X0834 对准器 PDF资料
1.产 品 资 料 介 绍:
DAIHEN SVD-002-X0834 对准器,其主要特点如下:
用于半导体晶圆传输对准定位。
高清光学成像,精准识别晶圆边缘。
微米级重复定位精度。
内置图像处理芯片,实时坐标校正。
光源亮度可调,适配多种晶圆。
密封镜头结构,防尘防雾。
伺服闭环调节,响应迅速。
标准通信接口,直连主控。
内置偏移报警,超差自动停机。
宽温运行,参数稳定无漂移。
全金属防腐壳体,耐腐蚀。
小型一体化设计,拆装便捷。
多重电路保护,防止过载。
出厂已校准,上机即用。
强抗电磁干扰屏蔽。
结尾:
以上特点使 DAIHEN SVD-002-X0834 在半导体设备中具备高精度、高可靠性的晶圆对准性能。
The DAIHEN SVD-002-X0834 aligner has the following main features:
Used for alignment and positioning of semiconductor wafer transport.
High definition optical imaging for precise identification of wafer edges.
Micron level repetitive positioning accuracy.
Built in image processing chip, real-time coordinate correction.
The brightness of the light source can be adjusted and adapted to various wafers.
Sealed lens structure, dustproof and anti fog.
Servo closed-loop regulation, fast response.
Standard communication interface, directly connected to the main control.
Built in offset alarm, automatic shutdown when out of tolerance.
Wide temperature operation, stable parameters without drift.
All metal anti-corrosion shell, corrosion-resistant.
Small integrated design, easy disassembly and assembly.
Multiple circuit protection to prevent overload.
Factory calibrated, ready to use on the machine.
Strong electromagnetic interference shielding.
ending:
The above characteristics enable DAIHEN SVD-002-X0834 to have high-precision and high reliability wafer alignment performance in semiconductor equipment.

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| AMAT 0100-01350 | AMAT 0190-43719 | AMAT 0190-15495-001 |
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| ABB 086444-003 | AMAT 0190-44194 | AMAT 0190-15591 |
| AMAT 0100-01490 | AMAT 0190-44196 | AMAT 0190-15603 |
| AMAT 0100-65520 | AMAT 0190-44702 | AMAT 0190-15672 |
| AMAT 0100-A0008 | AMAT 0190-45336 | AMAT 0190-15700 |
| AMAT 0100-00569 | AMAT 0190-45576 | AMAT 0190-15700 |
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