AMAT 0010-11590 控制器 PDF资料
1.产 品 资 料 介 绍:
AMAT 0010-11590 控制器,其主要特点如下:
用于精确测量和控制气体流量。
满量程流量为10 SCCM,适合低流量场景。
压力等级为20 Torr。
采用高精度传感器,控制稳定。
兼容多种半导体工艺气体。
响应速度快,实现实时调节。
支持模拟或数字通信接口。
结构紧凑,节省安装空间。
材质耐腐蚀,适用于腐蚀性气体。
具备自我诊断功能,方便排查故障。
符合洁净室使用标准。
适合长时间连续运行。
与AMAT设备兼容性良好。
支持零点与量程校准,保证精度。
常用于离子注入机等关键设备。
结尾:
以上特点确保了 AMAT 0010-11590 在半导体工艺中的精确控制与稳定运行。
AMAT 0010-11590 控制器 英文介绍
The AMAT 0010-11590 controller has the following main features:
Used for precise measurement and control of gas flow rate.
The full-scale flow rate is 10 SCCM, suitable for low flow scenarios.
The pressure level is 20 Torr.
Using high-precision sensors for stable control.
Compatible with multiple semiconductor process gases.
Fast response speed, achieving real-time adjustment.
Supports analog or digital communication interfaces.
Compact structure, saving installation space.
The material is corrosion-resistant and suitable for corrosive gases.
Equipped with self diagnostic function, convenient for troubleshooting.
Compliant with cleanroom usage standards.
Suitable for long-term continuous operation.
Good compatibility with AMAT devices.
Support zero and range calibration to ensure accuracy.
Commonly used in key equipment such as ion implantation machines.
ending:
The above features ensure precise control and stable operation of AMAT 0010-11590 in semiconductor processes.
AMAT 0010-11590 控制器 产品图片

3.其他产品
EMERSON A6370D 传感器
Bentley1900/65A-00-01-01-00-00风机振动监测器
BENTLY 125680-01位移检测模块
METSO PDP601 output unit module
469-P5-HI-A20-E-H Relay module
A3120/022-000 Vibration transducer
| AMAT 0190-09400 | AMAT 0190-35975 | AMAT 0190-13042 |
| AMAT 0010-03338 | AMAT 0190-35978 | AMAT 0190-13053 |
| AMAT 0190-34533 | AMAT 0190-36041 | AMAT 0190-13071 |
| AMAT 0190-09468 | AMAT 0190-36065 | AMAT 0190-13127 |
| AMAT 0020-39499 | AMAT 0190-36093 | AMAT 0190-13128 |
| AMAT 0190-14374 | AMAT 0190-36109 | AMAT 0190-13129 |
| AMAT 0190-34282 | AMAT 0190-36181 | AMAT 0190-13139 |
| AMAT 0190-28262 | AMAT 0190-36184 | AMAT 0190-13175 |
本篇文章出自瑞昌明盛自动化设备有限公司官网,转载请附上此链接:http://www.jiangxidc



