TEL F17-621561-2 超声波流量计 PDF资料
1.产 品 资 料 介 绍：
TEL F17-621561-2 超声波流量计，核心特点如下（共15条）：
中间（15条）
东京电子品牌专用超声波流量计组件。
用于半导体制造工艺中的液体流量测量与控制。
采用超声波传播时间差原理，测量精度高。
无活动部件，无压力损失，维护成本低。
接液部件采用半导体级PFA材质，耐腐蚀性强。
理想清洁结构，无O形圈等易积液密封件。
适用于纯水、超纯水及各类化学药液的流量测量。
可测量运动粘度高达40 mm²/s的高粘度流体。
测量精度可达示值的±1%以内。
具备抗气泡干扰能力，提升测量稳定性。
体积小巧，适合半导体设备紧凑空间安装。
支持多种信号输出方式，便于系统集成。
流量显示直观，便于现场监控。
符合CE及RoHS等国际标准认证。
出厂经严格测试验证，性能可靠稳定。
结尾
总之，型号 TEL F17-621561-2 采用无活动部件设计，具备高精度、耐腐蚀、抗气泡干扰等核心优势，专用于半导体湿法工艺中的微小流量测量场景，是保障制程稳定性的关键流量测控组件。
The TEL F17-62156-2 ultrasonic flowmeter has the following core features (15 in total):
Middle (15 items)
Specialized ultrasonic flowmeter components for Tokyo Electronics brand.
Used for liquid flow measurement and control in semiconductor manufacturing processes.
Adopting the principle of ultrasonic propagation time difference, the measurement accuracy is high.
No moving parts, no pressure loss, low maintenance cost.
The liquid receiving components are made of semiconductor grade PFA material, which has strong corrosion resistance.
Ideal cleaning structure, no O-rings or other sealing components that are prone to liquid accumulation.
Suitable for flow measurement of pure water, ultrapure water, and various chemical solutions.
It can measure high viscosity fluids with a kinematic viscosity of up to 40 mm ²/s.
The measurement accuracy can reach within ± 1% of the indicated value.
Capable of resisting bubble interference and improving measurement stability.
Compact size, suitable for compact space installation of semiconductor equipment.
Supports multiple signal output methods for easy system integration.
The flow display is intuitive and convenient for on-site monitoring.
Compliant with international standards such as CE and RoHS certification.
After strict testing and verification at the factory, the performance is reliable and stable.
ending
In summary, the TEL F17-62151-2 model adopts a zero moving parts design, which has core advantages such as high precision, corrosion resistance, and resistance to bubble interference. It is specifically designed for small flow measurement scenarios in semiconductor wet processes and is a key flow measurement and control component to ensure process stability.
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| 073-404145-00 | 531X304IBDASG1 | 6SC6100-0AB80 |
| 0644536-000 | 531X304IBDARG1 | 6DD1684-0GF0 |
| 0630260-000 | 531X304IBDANG1 | 531X102CCHAJM2 |
| 0604058-000 | 531X305NTBACG1 | 531X111PSHAEG1 |
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