NIKON 4S013-545-2 步进式扫描仪 PDF资料
1.产 品 资 料 介 绍：
NIKON 4S013-545-2 步进式扫描仪是Nikon半导体光刻设备中的专用组件，通常用于NSR系列步进扫描机台，负责扫描头的运动控制与图像数据采集。
中间（15条特点）
适配Nikon NSR系列步进扫描机台。
采用步进电机驱动扫描机构。
可实现高精度图像或数据采集。
运动控制稳定，避免扫描抖动。
支持自动聚焦与对准功能。
适用于半导体晶圆光刻精密对位。
内置控制器支持参数快速调整。
配合系统实现高速扫描与曝光。
采用工业级元器件，可连续运行。
具备自诊断功能，便于排查故障。
结构紧凑，适配机台内部空间。
接口定义符合Nikon设备标准。
信号完整性设计良好。
工作温度适应机台内部环境。
符合Nikon出厂标准规格。
结尾
总体而言，NIKON 4S013-545-2 是Nikon NSR系列步进扫描机台中的关键组件，能够满足半导体光刻工艺对扫描精度与稳定性的严格要求。
The NIKON 4S013-545-2 stepper scanner is a specialized component in Nikon semiconductor lithography equipment, typically used in NSR series stepper scanning machines, responsible for motion control of the scanning head and image data acquisition.
Middle (15 characteristics)
Compatible with Nikon NSR series stepper scanning machines.
Adopting a stepper motor to drive the scanning mechanism.
Can achieve high-precision image or data acquisition.
Stable motion control to avoid scanning jitter.
Support automatic focusing and alignment functions.
Suitable for precise alignment of semiconductor wafer lithography.
The built-in controller supports quick parameter adjustment.
Cooperate with the system to achieve high-speed scanning and exposure.
Using industrial grade components, it can operate continuously.
Equipped with self diagnostic function for easy troubleshooting.
Compact structure, suitable for the internal space of the machine.
The interface definition complies with Nikon device standards.
Good signal integrity design.
The working temperature is suitable for the internal environment of the machine.
Meets Nikon's factory standard specifications.
ending
Overall, NIKON 4S013-545-2 is a key component in Nikon NSR series stepper scanning machines, which can meet the strict requirements of semiconductor lithography processes for scanning accuracy and stability.
3.其他产品
LDSYN-101 模拟量输入输出模块
DSPX-310 扩展单元板
DSCA190V 模拟量输出模块
SP060S-MF2-20-1C1-2S Slow desktop module
T940X,XAPMM,BATT,ENG Semiconductor module
UNS0881a-P,V1 3BHB006338R0001 Excitation motherboard
| 489-P5-HI-A20-E-H | SS7-35B | IC3600TPAE1B |
| 489-P5-HI-A20-E | PSR45A-275 | IC3600TPAB1B |
| 489-P5-HI-A20 | SRB-MS-ILK5 | IC3600TPAB1 |
| 489-P5-HI-A1-E | SS2000OF | IC3600TPAA1A |
| 489-P1-LO-A20-E | SS2000M-D4 | IC3600TPAA1 |
| 489-P1-LO-A20 | S6961NP | IC3600TLFC1C |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
