AERA 3030-07404 质量流量控制器 PDF资料
1.产 品 资 料 介 绍：
AERA 3030-07404 质量流量控制器是半导体及精密制造工艺中用于精确测量和控制气体流量的核心部件，设计上侧重高精度与高可靠性。
中间（15条特点）
采用热式传感器原理测量气体流量。
支持多气体、多量程配置，适用性强。
气路底座采用316L不锈钢，耐腐蚀性好。
金属密封版本泄漏率极低。
配备高速阀门，响应时间通常在1秒以内。
控制精度通常可达±1% F.S.。
重复性优于±0.2% F.S.。
采用旁路分流设计，测量稳定。
支持0-5V或4-20mA模拟信号控制。
部分型号支持RS-485等数字通讯协议。
长期零漂低于0.5% F.S./年。
接口兼容VCR或Swagelok标准。
工作温度范围5-45℃。
适用于CVD、PVD、刻蚀等半导体制程。
结构紧凑，支持多方向安装。
结尾
总体而言，AERA 3030-07404 是一款性能稳定、精度可靠的质量流量控制器，能够满足半导体及工业领域对气体流量精确控制的严格要求
The AERA 3030-07404 mass flow controller is a core component used for precise measurement and control of gas flow in semiconductor and precision manufacturing processes, with a focus on high precision and reliability in design.
Middle (15 characteristics)
Using the principle of thermal sensors to measure gas flow rate.
Supports multi gas and multi range configurations, with strong applicability.
The gas path base is made of 316L stainless steel, which has good corrosion resistance.
The metal sealed version has an extremely low leakage rate.
Equipped with high-speed valves, the response time is usually within 1 second.
The control accuracy can usually reach ± 1% F.S.
The repeatability is better than ± 0.2% F.S.
Adopting a bypass diversion design for stable measurement.
Supports 0-5V or 4-20mA analog signal control.
Some models support digital communication protocols such as RS-485.
Long term zero drift below 0.5% F.S. per year.
The interface is compatible with VCR or Swagelok standards.
The working temperature range is 5-45 ℃.
Suitable for semiconductor processes such as CVD, PVD, etching, etc.
Compact structure, supporting multi-directional installation.
ending
Overall, AERA 3030-07404 is a quality flow controller with stable performance and reliable accuracy, capable of meeting the strict requirements for precise gas flow control in the semiconductor and industrial fields
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