VAT 61234-KEAP-AQN 控制蝶阀系统 PDF资料
1.产 品 资 料 介 绍：
VAT 61234-KEAP-AQN 控制蝶阀系统产品特点
VAT 61234-KEAP-AQN 是瑞士 VAT 公司 612 系列的一款集成式控制蝶阀系统，专为半导体等高要求真空工艺设计。其主要特点如下：
属于 VAT 612 系列，公称通径为 DN 50（2英寸）。
法兰规格为 ISO-KF 标准，兼容性好。
阀体采用不锈钢材质，耐腐蚀性强。
集成控制器与步进电机驱动，阀板定位快速精确。
配备专用逻辑接口，支持远程控制与系统集成。
支持压力控制和位置控制两种工作模式。
集成 4 位数码管显示屏，实时显示阀门状态和位置。
具备自学习功能，可自动优化 PID 控制参数。
支持配套软件进行本地设置、测试和维护。
配备数字输入接口，支持远程开关及归零操作。
支持 1 个或 2 个外部压力传感器输入。
工作压力范围为 1×10⁻⁸ mbar 至 1.2 bar。
阀体最高耐温 150℃，驱动器最高耐温 50℃。
阀板关闭位置最大可承受 1 bar 压差。
工作电源为 24V DC，可选配传感器电源或断电保护模块。
综上，VAT 61234-KEAP-AQN 是一款集成智能控制与驱动功能的高真空蝶阀系统，适用于半导体制造等对真空控制要求较高的精密工艺场景。
VAT 61234-KEAP-AQN 控制蝶阀系统 英文介绍
VAT 61234-KEPA-AQN Control Butterfly Valve System Product Features
VAT 61234-KEPA-AQN is an integrated control butterfly valve system from the Swiss VAT company's 612 series, designed specifically for high demand vacuum processes such as semiconductors. Its main characteristics are as follows:
Belonging to the VAT 612 series, with a nominal diameter of DN 50 (2 inches).
The flange specification is ISO-KF standard, with good compatibility.
The valve body is made of stainless steel material, which has strong corrosion resistance.
Integrated controller and stepper motor drive, valve plate positioning is fast and accurate.
Equipped with dedicated logic interfaces, supporting remote control and system integration.
Supports two working modes: pressure control and position control.
Integrated 4-digit digital display screen, real-time display of valve status and position.
Equipped with self-learning function, it can automatically optimize PID control parameters.
Support local setup, testing, and maintenance of supporting software.
Equipped with digital input interface, supporting remote switching and zeroing operations.
Supports 1 or 2 external pressure sensor inputs.
The working pressure range is from 1 × 10 ⁻⁸ mbar to 1.2 bar.
The maximum temperature resistance of the valve body is 150 ℃, and the maximum temperature resistance of the driver is 50 ℃.
The valve plate can withstand a maximum pressure difference of 1 bar when closed.
The working power supply is 24V DC, with optional sensor power supply or power-off protection module.
In summary, VAT 61234-KEPA-AQN is a high vacuum butterfly valve system that integrates intelligent control and drive functions, suitable for precision process scenarios such as semiconductor manufacturing that require high vacuum control.
VAT 61234-KEAP-AQN 控制蝶阀系统 产品图片
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| 6ES5948-3UR23 | 01-17423-003 | EXM-15A |
| 6ES5948-3UR11 | 6SC6100-0SA11 | 0660-01857 |
| 6ES5948-3UA12 | 6SC6103-0SE30 | C52711-022 |
| 6ES5945-7UA21 | 6SC6500-ONA04 | CE945GM2B-440 |
| 6ES5943-7UB21 | 6SC6110-0EA00 | exm-10a |
| 6ES5942-7UB11 | 6SC6114-5DA00 | 61-0654-22 |
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