MKS 0190-45963 采集模块 PDF资料 

1.产 品 资 料 介 绍：

MKS 0190-45963 采集模块 英文介绍

MKS 0190-45963 acquisition module

Introduction: MKS 0190-45963 Semiconductor Equipment Dedicated Signal Acquisition Board, capable of collecting vacuum and gas sensing signals

1. High precision analog-to-digital conversion, small pressure and flow measurement errors

2. Multi channel synchronous acquisition, compatible with MFC and vacuum gauge sensors

3. Onboard optoelectronic isolation to resist radio frequency and motor electromagnetic interference

4. Short circuit and overvoltage circuit protection to prevent damage to the board

5. Adapt to semiconductor equipment bus and communicate with the main control at high speed

6. CPCI plug-in card structure, convenient for cabinet insertion and replacement

7. Channel indicator light, quickly locate and collect abnormal points

8. Built in filtering circuit to eliminate signal clutter and fluctuations

9. Industrial wide temperature element devices, clean production lines operate stably 24 hours a day

10. Real time uploading of collected data for process closed-loop control

11. Store historical collection records for easy fault tracing and analysis

12. Standardized interface terminals, replacement without changing external circuits

13. Anti vibration PCB board, suitable for chamber equipment working conditions

14. Support parallel expansion of acquisition points for multiple modules

15. This MKS 0190-45963 is compatible with etching and thin film vacuum machines

Conclusion: Precise Collection of Vacuum and Gas Process Data, MKS 0190-45963 Semiconductor Specialized Collection Spare Parts

MKS 0190-45963 采集模块  产品图片

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型号：MKS 0190-45963 采集模块

质保：一年

成色：全新/二手

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