XEI 232260-01 离子体清洁器 PDF资料
1.产 品 资 料 介 绍：
XEI 232260-01 是XEI Scientific公司推出的等离子体清洁器，主要用于清除扫描电镜、透射电镜等真空系统内的碳氢化合物污染，提升成像质量和分析精度。
产品特点（中间15条）
属于Evactron系列远程等离子体清洁产品。
采用下游等离子体清洗工艺，通过氧自由基氧化去除碳污染物。
使用空气作为工艺气体即可产生清洗用氧自由基。
适用于SEM、TEM、FIB、XPS等多种真空分析设备。
可有效去除指纹、油污、颗粒物等有机残留。
有助于缩短抽真空时间，维持系统极限真空度。
通过减少荷电效应和提升信噪比，改善图像质量。
采用空心阴极等离子体源设计，能量效率高。
采用专利外部射频空心阴极设计，减少微粒产生。
支持在高真空下直接启动，操作便捷。
射频频率为13.56 MHz，功率在35至75瓦之间可调。
配备专用控制器或触摸板界面，便于操作和参数设置。
支持预设配方设置清洗时间、功率和周期。
符合CE、NRTL及SEMI S2等安全和行业标准。
产品设计紧凑，便于集成到现有设备中。
结尾
XEI 232260-01 等离子体清洁器凭借有效的碳污染去除能力和便捷的操作方式，是提升精密分析设备性能的重要工具，为获得高质量成像和分析结果提供了可靠保障。
XEI 232260-01 离子体清洁器 英文介绍
XEI 232260-01 is a plasma cleaner launched by XEI Scientific, mainly used to remove hydrocarbon contamination in vacuum systems such as scanning electron microscopy and transmission electron microscopy, improve imaging quality and analysis accuracy.
Product features (middle 15)
Belonging to the Evactron series of remote plasma cleaning products.
Using downstream plasma cleaning technology, carbon pollutants are removed through oxygen radical oxidation.
Using air as the process gas can generate oxygen free radicals for cleaning.
Suitable for various vacuum analysis equipment such as SEM, TEM, FIB, XPS, etc.
It can effectively remove organic residues such as fingerprints, oil stains, and particulate matter.
Helps to shorten the vacuuming time and maintain the maximum vacuum degree of the system.
By reducing the charge effect and improving the signal-to-noise ratio, the image quality can be improved.
Designed with a hollow cathode plasma source, it has high energy efficiency.
Adopting patented external RF hollow cathode design to reduce particle generation.
Support direct startup under high vacuum, easy to operate.
The RF frequency is 13.56 MHz and the power is adjustable between 35 and 75 watts.
Equipped with a dedicated controller or touchpad interface for easy operation and parameter setting.
Support preset formula settings for cleaning time, power, and cycle.
Compliant with safety and industry standards such as CE, NRTL, and SEMI S2.
The product design is compact and easy to integrate into existing equipment.
ending
The XEI 232260-01 plasma cleaner, with its effective carbon pollution removal capability and convenient operation, is an important tool for improving the performance of precision analysis equipment, providing reliable guarantees for obtaining high-quality imaging and analysis results.
XEI 232260-01 离子体清洁器 产品图片
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