TMP EI-R04MT涡轮分子泵控制器 PDF资料
TMP EI-R04MT 这个涡轮分子泵控制器,是日本岛津做的,属于磁悬浮涡轮分子泵的分离式电源单元,通常跟 TMP-3304、TMP-4304 这些泵配套用。
产品特点
1 岛津原厂 EI-R04MT 涡轮分子泵电源单元,日本制造,带 CE 认证
2 属于 EI-R04 系列,带 T 后缀表示支持泵温控功能
3 市面上有全新 surplus 和工作剩余件两种状态流通,工作件外观可能有轻微痕迹
4 支持远程触点控制和串口通信,前面板 RS-232C,后面板 RS-485
5 转速可在额定转速的 25% 到 100% 之间调节
产品参数
1 型号 EI-R04MT,属于 EI-R04 系列
2 最大功率 2.0 kVA,单相 AC 200 到 240V
3 泵温控设定温度 65℃ 或 75℃
4 工作环境温度 0 到 45℃,湿度 40 到 80%RH
5 重量 8 kg
产品应用领域
1 岛津磁悬浮涡轮分子泵 TMP-3304、TMP-4304 等型号的配套电源
2 半导体制造设备的高真空系统
3 需要泵温控的真空工艺环节
4 设备维护或备件替换时用
5 老旧岛津真空系统的维修翻新
这块控制器就是管岛津涡轮泵运行的,带温控功能,跟 TMP-3304 或 TMP-4304 泵搭着用
TMP EI-R04MT涡轮分子泵控制器 英文介绍
The TMP EI-R04MT turbomolecular pump controller is made by Shimadzu, Japan, and belongs to the separated power supply unit of magnetic levitation turbomolecular pumps. It is usually used in conjunction with pumps such as TMP-3304 and TMP-4304.
Product Features
1 Shimadzu Original EI-R04MT Turbomolecular Pump Power Supply Unit, Made in Japan, with CE Certification
2 belongs to the EI-R04 series, with a T suffix indicating support for pump temperature control function
There are two states of circulation on the market: brand new surplus and leftover work parts, and there may be slight marks on the appearance of the work parts
4 supports remote contact control and serial communication, front panel RS-232C, rear panel RS-485
5. The speed can be adjusted between 25% and 100% of the rated speed
Product Specifications
1 model EI-R04MT, belonging to the EI-R04 series
2 Maximum power 2.0 kVA, single-phase AC 200 to 240V
3 pumps with temperature control set at 65 ℃ or 75 ℃
4. Working environment temperature: 0 to 45 ℃, humidity: 40 to 80% RH
5 weight 8 kg
Product application areas
1. Supporting power supply for Shimadzu magnetic levitation turbo molecular pumps TMP-3304, TMP-4304 and other models
High vacuum system for semiconductor manufacturing equipment
3 Vacuum process steps that require pump temperature control
Used for equipment maintenance or spare parts replacement
5 Maintenance and Renovation of Old Shimadzu Vacuum Systems
This controller is designed for the operation of the Shimadzu turbopump, with temperature control function, and can be used in conjunction with the TMP-3304 or TMP-4304 pump
TMP EI-R04MT涡轮分子泵控制器 产品图片

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