ADTEC Plasma Technology AMV-2000AMT自动阻抗匹配单元 PDF资料
ADTEC AMV-2000AMT 这个自动阻抗匹配单元,是日本 ADTEC Plasma Technology 做的,用在射频等离子体系统里,负责让射频电源和等离子腔体之间的阻抗对上。
产品特点
1 ADTEC 原厂自动阻抗匹配单元,韩国制造,市面上以工作剩余件状态流通
2 专门用于射频等离子体系统的阻抗匹配,属于 ADTEC AMV 系列
3 市面上流通的件外壳有划痕和凹陷,但功能正常
4 物理状态描述为有外观瑕疵,属于使用过的剩余件
5 适配射频电源与等离子体负载之间的匹配需求
产品参数
1 型号 AMV-2000AMT
2 品牌 ADTEC Plasma Technology
3 类型 Automatic Impedance Matching Unit 自动阻抗匹配单元
4 产地 韩国
5 状态 Working Surplus 工作剩余件
产品应用领域
1 半导体制造里的等离子刻蚀工艺
2 PECVD 等离子增强化学气相沉积设备
3 射频等离子体系统的功率匹配
4 设备维护或备件替换时用
5 老旧等离子体设备的维修翻新
这块匹配单元在射频等离子体系统里算是常见备件
ADTEC Plasma Technology AMV-2000AMT自动阻抗匹配单元 英文介绍
The ADTEC AMV-2000AMT automatic impedance matching unit is made by ADTEC Plasma Technology in Japan and is used in RF plasma systems to match the impedance between the RF power supply and the plasma chamber.
Product Features
1 ADTEC original factory automatic impedance matching unit, manufactured in Korea, circulating in the market in the state of working surplus parts
2 impedance matching specifically designed for RF plasma systems, belonging to the ADTEC AMV series
There are scratches and dents on the outer shell of the three components circulating in the market, but they function normally
4. The physical state is described as having appearance defects, which belong to the remaining parts that have been used
5 Matching requirements between RF power supply and plasma load
Product Specifications
Model 1 AMV-2000AMT
2 Brands ADTEC Plasma Technology
3 types of Automatic Impedance Matching Unit
Origin: South Korea
5 Status Working Surplus Work Remaining Parts
Product application areas
Plasma etching process in semiconductor manufacturing
2 PECVD plasma enhanced chemical vapor deposition equipment
Power matching of 3 RF plasma systems
Used for equipment maintenance or spare parts replacement
Maintenance and renovation of 5 old plasma equipment
This matching unit is considered a common spare part in RF plasma systems
ADTEC Plasma Technology AMV-2000AMT自动阻抗匹配单元 产品图片

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