AMAT 0010-09237 CVD灯模块组件 PDF资料
AMAT 0010-09237 这个 CVD 灯模块组件,是 Precision 5000 系列设备上 BWCVD 工艺用的 200mm 灯模块,市面上有工作剩余件在流通。
产品特点
1 AMAT 原厂 200mm 灯模块,BWCVD 工艺用,适配 Precision 5000 系统
2 市面上流通的主要是 working surplus 工作剩余件
3 物理状态不错,但有之前使用和搬运的痕迹
4 属于 CVD 工艺腔体的加热光源模块组件
5 备件属性明确,直接对应 AMAT P5000 平台
产品参数
1 型号 0010-09237
2 类型 200mm Lamp Module,BWCVD 灯模块
3 适配平台 AMAT Precision 5000
4 品牌 Applied Materials
5 状态 Working Surplus,有使用痕迹
产品应用领域
1 AMAT Precision 5000 设备的 BWCVD 工艺
2 200mm 晶圆 CVD 沉积的加热光源
3 设备维护或备件替换时用
4 老旧 P5000 设备的维修翻新
5 晶圆厂备件储备
这块灯模块在 P5000 平台上算是个常见备件,BWCVD 工艺离不了它
AMAT 0010-09237, a CVD lamp module component, is a 200mm lamp module used in the BWCVD process on Precision 5000 series equipment. There are leftover parts in circulation on the market.
Product Features
1 AMAT original 200mm lamp module, used for BWCVD process, compatible with Precision 5000 system
The main products circulating in the market are working surplus and surplus work items
The physical condition is good, but there are traces of previous use and handling
4 Heating light source module components belonging to CVD process chamber
5 spare parts with clear attributes, directly corresponding to the AMAT P5000 platform
Product Specifications
Model 0010-09237
Type 2 200mm Lamp Module, BWCVD Lamp Module
3 Adaptation Platform AMAT Precision 5000
4 Brands Applied Materials
5 states Working Surplus, with usage traces
Product application areas
BWCVD process for AMAT Precision 5000 equipment
Heating light source for 2 200mm wafer CVD deposition
Used for equipment maintenance or spare parts replacement
Repair and refurbishment of outdated P5000 equipment
Spare parts reserve for 5 wafer fabs
This light module is a common spare part on the P5000 platform, and the BWCVD process cannot do without it

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