Varian 9699461S002涡轮泵控制器  PDF资料

1.产 品 资 料 介 绍：

Varian 9699461S002 这个涡轮泵控制器，是 BOC Edwards 的 Turbo-V 1800 系列控制器，Varian 自己的型号就是 Turbo-V1800，对应 Varian Ion Implant Systems 的零件号 E23000028。市面上流通的主要是原厂翻新件。

产品特点
1 Varian 原厂 Turbo-V 1800 涡轮泵控制器，对应 Ion Implant Systems 零件号 E23000028
2 市面上流通的主要是 manufacturer refurbished 原厂翻新状态
3 固态频率转换器设计，带微处理器控制和自诊断保护功能
4 前面板带启动停止复位按钮，还有功率、频率、转速、故障等多组显示
5 支持远程逻辑控制接口，能跟系统联锁信号对接

产品参数
1 型号 9699461S002，对应 Turbo-V1800
2 类型 涡轮分子泵控制器，固态频率转换器
3 控制方式 微处理器控制，带自诊断和保护
4 显示 功率、频率、转速、故障代码、小时计数器
5 通信 支持 RS-232/RS-422 串口，波特率 9600 或 4800 可选

产品应用领域
1 Varian 离子注入设备的真空系统配套
2 需要 Turbo-V 1800 泵的高真空工艺环节
3 半导体制造设备的高真空系统
4 设备维护或备件替换时用
5 老旧 Varian 真空系统的维修翻新

总之这个控制器就是管 Turbo-V 1800 泵运行的 

Varian 9699461S002涡轮泵控制器   英文介绍

The Varian 9699461S002 turbopump controller is a Turbo-V 1800 series controller from BOC Edwards. Varian's own model is Turbo-V1800, corresponding to the part number E23000028 of Varian Ion Implant Systems. The main products circulating on the market are refurbished parts from the original factory.

Product Features

1 Varian original Turbo-V 1800 turbo pump controller, corresponding to Ion Implant Systems part number E23000028

The main products circulating on the market are manufacturer refurbished original factory refurbished status

3 Solid state frequency converter design with microprocessor control and self diagnostic protection function

The front panel has a start stop reset button, as well as multiple displays for power, frequency, speed, faults, and more

5 supports remote logic control interface and can interface with system interlocking signals

Product Specifications

Model 1 9699461S002, corresponding to Turbo-V1800

2-type turbo molecular pump controller, solid-state frequency converter

3 control modes: microprocessor control with self diagnosis and protection

4 Display power, frequency, speed, fault code, hour counter

5 communication supports RS-232/RS-422 serial ports, with optional baud rates of 9600 or 4800

Product application areas

Vacuum system matching for Varian ion implantation equipment

2 High vacuum process steps requiring Turbo-V 1800 pump

High vacuum system for semiconductor manufacturing equipment

Used for equipment maintenance or spare parts replacement

Repair and refurbishment of 5 old Varian vacuum systems

In short, this controller is designed to operate the Turbo-V 1800 pump and is mostly refurbished

Varian 9699461S002涡轮泵控制器 产品图片

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型号：Varian 9699461S002涡轮泵控制器

质保：一年

成色：全新/二手

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