ENI 0190-08279等离子发生器 PDF资料
ENI 0190-08279 这个等离子发生器，其实是 ENI 的 DCG-200Z 型号直流等离子电源，AMAT 那头挂的零件号就是 0190-08279，ENI 自己的完整料号是 DC21M-Z041300110A 或 DC21M-Z141300110A。市面上有测试完好件和全新 surplus 流通，状态差异比较大。
产品特点
1 ENI 原厂 DCG-200Z 直流等离子发生器，AMAT 对应零件号 0190-08279
2 带 CE 认证，属于 Master 主机配置，无 slave 从机
3 支持 DeviceNet 通信，前面板全功能可用
4 市面上有测试完好件和 surplus 库存件两种状态
5 部分流通件外观有凹陷，但功能不受影响
产品参数
1 型号 DCG-200Z，AMAT 零件号 0190-08279
2 输入电压 340-480V 三相，50/60Hz，输入电流 23A
3 功率 10KW Master 配置
4 电流抽头 400V、500V、645V
5 带数字面板表，支持 Low Z 模式
产品应用领域
1 AMAT 半导体设备的等离子工艺
2 晶圆厂刻蚀、沉积等真空腔体的直流等离子源
3 需要 DeviceNet 通信的等离子功率控制系统
4 设备维护或备件替换时用
5 老旧 AMAT 等离子设备的维修翻新
总之这个发生器就是给等离子腔体供直流功率的，DCG-200Z 带 DeviceNet。手里有的话，记得把型号和 ENI 完整料号都对一遍，surplus 件的状态也确认好，工业备件号对上了才放心。
ENI 0190-08279等离子发生器 英文介绍
The plasma generator ENI 0190-08279 is actually ENI's DCG-200Z model DC plasma power supply. The part number hanging on the AMAT end is 0190-08279, and ENI's complete part number is DC21M-Z041300110A or DC21M-Z141300110A. There are tested intact parts and brand new Surplus in circulation on the market, with significant differences in status.
Product Features
1 ENI original DCG-200Z DC plasma generator, corresponding to AMAT part number 0190-08279
2 with CE certification, belonging to Master host configuration, no slave slave slave
3 supports DeviceNet communication, and the front panel is fully functional and available
There are two states of tested intact parts and surplus inventory parts on the market
5 parts of the circulation components have dents in appearance, but their functionality is not affected
Product Specifications
Model 1 DCG-200Z, AMAT part number 0190-08279
Input voltage 340-480V three-phase, 50/60Hz, input current 23A
3 Power 10KW Master Configuration
4 current taps 400V, 500V, 645V
5 with digital panel display, supporting Low Z mode
Product application areas
Plasma process of AMAT semiconductor equipment
DC plasma source for vacuum chambers such as etching and deposition in wafer fabs
Plasma power control system requiring DeviceNet communication
Used for equipment maintenance or spare parts replacement
Maintenance and refurbishment of 5 old AMAT plasma equipment
In short, this generator is designed to supply DC power to the plasma chamber, with DCG-200Z equipped with DeviceNet. If you have it in hand, remember to double check the model and ENI complete part number, and confirm the status of the surplus parts. Only when the industrial spare part number is matched can you feel at ease.
ENI 0190-08279等离子发生器 产品图片
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