TEL 5085-408084-11冷热板 PDF资料
TEL 5085-408084-11 这个冷热板，是东京电子（TEL）Lithius 光刻轨道系统里的 CPL 冷却板工艺站组件，产地在日本。市面上流通的主要是从 Lithius 系统上拆下来的二手件，状态有好有坏。
产品特点
1 TEL 原厂 CPL 冷却板工艺站，用在 Lithius 光刻轨道系统里
2 日本制造，工业级品质
3 市面上流通的主要是从 Lithius 系统拆下来的二手件
4 状态差异较大，有工作件、未测试件、缺件等多种情况
5 部分拆机件缺前盖、PCB、传感器或控制器
产品参数
1 型号 5085-408084-11
2 类型 CPL 冷却板工艺站
3 品牌 东京电子 Tokyo Electron
4 产地 日本
5 适配系统 TEL Lithius 光刻轨道系统
产品应用领域
1 TEL Lithius 光刻轨道系统的晶圆冷却工艺
2 光刻胶涂布显影流程中的温度控制
3 300mm 晶圆厂的前端工艺设备
4 设备维护或备件替换时用
5 老旧 TEL 轨道系统的维修翻新
总之这块冷热板就是 Lithius 系统里管晶圆冷却的，拆机件居多。
TEL 5085-408084-11 is a component of the CPL cooling plate process station in the lithography track system of Tokyo Electronics (TEL) Lithium, produced in Japan. The main items circulating on the market are second-hand parts removed from the Lithius system, with varying degrees of condition.
Product Features
1 TEL original CPL cooling plate process station, used in Lithius lithography track system
Made in Japan, industrial grade quality
The main items circulating in the market are second-hand parts removed from the Lithius system
There are significant differences in the four states, including working parts, untested parts, missing parts, and other situations
Part 5 of the disassembled parts lack a front cover PCB、 Sensors or controllers
Product Specifications
Model 5085-408084-11
Type 2 CPL cooling plate process station
3 brands Tokyo Electron
4 Origin: Japan
5 Adaptation System TEL Lithium Lithography Track System
Product application areas
Wafer cooling process for TEL Lithium lithography track system
Temperature control in the coating and development process of photoresist
Front end process equipment for 300mm wafer fab
Used for equipment maintenance or spare parts replacement
Maintenance and renovation of 5 old TEL rail systems
In short, this hot and cold plate is the one used for wafer cooling in the Lithius system, and it is mostly disassembled.
3.其他产品
SPBRC410 控制器模块
HIMA K9202机柜风扇模块
134177-001 电源底座
4.其他产品
VMIVME-6015 Gas turbine signal card
VMIVME-6016 Gas turbine signal card
VMIVME-7452-500140 Gas turbine programming module
| 710-609995-003 | 193X801DAG01 | 710-611487-001 |
| 710-608020-01 | 193X740ACG01 | 531X309PCAJG1 |
| 710-606238-005 | 193X803BCG03 | 073-614993-000 |
| 710-606238-00 | 6DD1684-0FB0 | 500-22333-001 |
| 710-566009-00 | 6DD1684-0EF0 | 710-660800-00 |
| 710-566008-00 | 03-417236-00 | 720-06888-001 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com
