Agilent EX9698811涡轮分子泵 PDF资料
Agilent EX9698811 这个涡轮分子泵，其实就是 Agilent/Varian 的 TV903 泵系统，属于半导体设备里用来抽高真空的核心部件。
产品特点
1 Agilent/Varian 的 TV903 涡轮分子泵系统，带内置控制器
2 抽速 680 升每秒，极限真空能到 1×10⁻⁹ 级别
3 意大利制造，工业级品质
4 市面上有翻新、测试完好、未测试等多种状态流通
5 部分流通件外壳有凹陷，但转子能自由转动，不影响核心功能
产品参数
1 型号 EX9698811，对应 TV903 泵系统
2 抽速 680 升每秒
3 极限真空 1×10⁻⁹
4 进气法兰 DN 160 ISO-F 专用高真空法兰
5 出气法兰 DN 25 ISO-KF
产品应用领域
1 半导体制造设备的高真空系统
2 质谱仪等分析仪器的真空环境搭建
3 LC-MS-MS 液质联用系统的真空泵
4 设备维护或备件替换时用
5 老旧真空系统的翻新升级
总之这个泵就是抽高真空用的，TV903 系统带控制器，跟 Agilent/Varian 设备搭着
The Agilent EX9698811 turbomolecular pump is actually Agilent/Varian's TV903 pump system, which is a core component used for high vacuum pumping in semiconductor equipment.
Product Features
1 Agilent/Varian TV903 Turbomolecular Pump System with Built in Controller
The pumping speed is 680 liters per second, and the maximum vacuum can reach the level of 1 × 10 ⁻⁹
Made in Italy, industrial grade quality
There are various states of circulation on the market, such as refurbished, tested intact, and untested
Part 5 of the circulation components have dents on the outer shell, but the rotor can rotate freely without affecting the core function
Product Specifications
Model EX9698811, corresponding to TV903 pump system
2 pumping speed 680 liters per second
3 extreme vacuum 1 × 10 ⁻⁹
4 intake flange DN 160 ISO-F special high vacuum flange
5 outlet flange DN 25 ISO-KF
Product application areas
High vacuum system for semiconductor manufacturing equipment
Vacuum environment construction for analytical instruments such as mass spectrometers
Vacuum pump for LC-MS-MS liquid chromatography-mass spectrometry system
Used for equipment maintenance or spare parts replacement
Renovation and upgrade of 5 old vacuum systems
In short, this pump is designed for high vacuum pumping. The TV903 system comes with a controller and is integrated with Agilent/Varian equipment
3.其他产品
Woodward 8237-1369 数字控制器
1S420ESWBH3A 以太网交换机
UCSC H1 IS420UCSCH1A-B 控制器模块
4.其他产品
VMIVME-5599 Gas turbine interface card
VMIVME-5651 Gas turbine signal card
VMIVME-6015 Gas turbine signal card
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| 710-608020-01 | 193X740ACG01 | 531X309PCAJG1 |
| 710-606238-005 | 193X803BCG03 | 073-614993-000 |
| 710-606238-00 | 6DD1684-0FB0 | 500-22333-001 |
| 710-566009-00 | 6DD1684-0EF0 | 710-660800-00 |
| 710-566008-00 | 03-417236-00 | 720-06888-001 |
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