LAM 27-382473-00射频匹配器 PDF资料
LAM 27-382473-00 这个射频匹配器，其实是 Comet Technologies 给 Lam Research 代工的，Comet 那边的零件号是 20033653。市面上有全新库存和未测试两种状态在流通。
产品特点
1 Lam Research 设备用的射频匹配器，原厂是 Comet Technologies
2 Comet 对应零件号 20033653，美国品牌但产地是中国
3 射频输入功率 5000 瓦连续波，工作频率 13.56 MHz
4 射频输出 2500 Vrms，最大电流 25 Arms
5 市面上有全新 surplus 和未测试 as-is 两种状态流通
产品参数
1 型号 27-382473-00，对应 Comet 零件号 20033653
2 工作频率 13.56 MHz
3 射频输入 5000 瓦连续波
4 射频输出 2500 Vrms 25 Arms
5 带 CE 认证，产地中国
产品应用领域
1 Lam Research 等离子刻蚀设备的射频功率匹配
2 PECVD 等离子增强化学气相沉积工艺
3 溅射沉积的射频功率匹配
4 设备维护或备件替换时用
5 老旧 Lam 设备的维修翻新
总之这个匹配器就是管射频功率和等离子腔体之间阻抗匹配的，跟 Lam 和 Comet 设备搭着用
The LAM 27-382473-00 RF matching device is actually manufactured by Comet Technologies for Lam Research, and the part number on Comet's end is 20033653. There are two states in circulation on the market: brand new inventory and untested.
Product Features
The RF matching device used for Lam Research equipment is manufactured by Comet Technologies
2 Comet corresponds to part number 20033653, an American brand but originating from China
3 RF input power 5000 watts continuous wave, operating frequency 13.56 MHz
4 RF output 2500 Vrms, maximum current 25 Arms
There are two states of circulation on the market: the new surplus and the untested as is
Product Specifications
Model 27-382473-00, corresponding to Comet part number 20033653
Working frequency 13.56 MHz
3 RF inputs 5000 watts continuous wave
4 RF outputs 2500 Vrms 25 Arms
5 with CE certification, originating from China
Product application areas
RF power matching of Lam Research plasma etching equipment
2 PECVD plasma enhanced chemical vapor deposition process
RF power matching for sputtering deposition
Used for equipment maintenance or spare parts replacement
Maintenance and renovation of 5 old Lam equipment
In short, this matching device is designed to match the impedance between the RF power of the tube and the plasma chamber, and is used in conjunction with Lam and Comet devices. If you have it in your hand, remember to double check the model and Comet number. Only by matching the industrial spare part number can you feel at ease.
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| 710-566008-00 | 03-417236-00 | 720-06888-001 |
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