AMAT 0190-43295自动匹配器  PDF资料

1.产 品 资 料 介 绍：

AMAT 0190-43295 这个自动匹配器，其实就是 AMAT 设备上用的射频自动阻抗匹配网络。它的原厂是 COMET Technologies，COMET 那边的零件号是 20067921，AMAT 这头挂的是 0190-43295。

产品特点
1 射频自动阻抗匹配器，用来让射频源和等离子腔体之间的阻抗对上
2 COMET Technologies 原厂，美国制造，工业级设计
3 工作频率 13.56 MHz，属于工业科学医疗常用频段
4 市面上有全新库存和二手工作件两种状态流通
5 控制接口支持模拟 0-10V 和数字 RS-232/RS-485

产品参数
1 型号 0190-43295，对应 COMET 零件号 20067921
2 工作频率 13.56 MHz
3 最大连续输入功率 5000 W
4 电压额定值 3500 Vrms，最大电流 25 A
5 输入阻抗 50 欧姆，负载匹配范围大概 2 到 500 欧姆

产品应用领域
1 半导体制造里的等离子刻蚀工艺
2 PECVD 等离子增强化学气相沉积设备
3 溅射沉积工艺的射频功率匹配
4 AMAT 等离子设备的配套匹配网络
5 设备维护或备件替换时用

总之这个匹配器就是管射频功率和等离子腔体之间阻抗匹配的，跟 COMET 和 AMAT 设备搭着用

AMAT 0190-43295自动匹配器  英文介绍

The AMAT 0190-43295 automatic matching device is actually the RF automatic impedance matching network used on AMAT equipment. Its original factory is COMET Technologies, and the part number on COMET's end is 20067921. The AMAT end is labeled as 0190-43295.

Product Features

1 RF automatic impedance matching device, used to match the impedance between the RF source and the plasma chamber

COMET Technologies, manufactured in the United States, industrial grade design

The working frequency is 13.56 MHz, which is a commonly used frequency band in industrial science and medical fields

There are two states of circulation in the market: brand new inventory and second-hand work parts

5 control interfaces support analog 0-10V and digital RS-232/RS-485

Product Specifications

Model 0190-43295, corresponding to COMET part number 20067921

Working frequency 13.56 MHz

Maximum continuous input power of 5000 W

Rated voltage of 3500 Vrms, maximum current of 25 A

5 input impedance of 50 ohms, load matching range of approximately 2 to 500 ohms

Product application areas

Plasma etching process in semiconductor manufacturing

2 PECVD plasma enhanced chemical vapor deposition equipment

RF power matching for sputtering deposition process

4 Matching Network for AMAT Plasma Equipment

Used for equipment maintenance or spare parts replacement

In short, this matching device is designed to match the impedance between RF power and plasma cavity, and is used in conjunction with COMET and AMAT equipment

Genus X6045500电流积分器组件 产品图片

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型号：Genus X6045500电流积分器组件

质保：一年

成色：全新/二手

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