Genus X6045500电流积分器组件 PDF资料
Genus X6045500 这个电流积分器组件,是 AMAT 的 Genus 系列设备里用的,具体来说就是离子注入机上的束流电流积分器组件。它的原厂零件号是 X6045500,装在机架上,负责测量和积分离子束的电流。
产品特点
1 Genus 原厂的束流电流积分器组件,机架安装式,原厂翻新件流通较多
2 专门用于离子注入机的离子束电流测量与积分
3 工业级设计,适配 AMAT Genus 系列设备的机架系统
4 市面上以 manufacturer refurbished 原厂翻新状态为主
5 属于离子注入工艺里控制束流剂量的关键测量部件
产品参数
1 型号 X6045500
2 类型 机架安装式束流电流积分器组件
3 所属品牌 Genus,属于 AMAT 旗下
4 状态 原厂翻新
5 功能 离子束电流的测量与积分
产品应用领域
1 离子注入机的束流剂量控制
2 AMAT Genus 系列离子注入设备的配套组件
3 半导体制造中离子注入工艺的束流监测
4 设备维护时替换或翻新件更换
5 老旧离子注入设备的维修备件
总之这个组件就是离子注入机里管束流测量的,跟 Genus 设备搭着用
The Genius X6045500 current integrator component is used in AMAT's Genius series equipment, specifically the beam current integrator component on the ion implantation machine. Its original part number is X6045500, installed on the rack, responsible for measuring and integrating the current of the ion beam.
Product Features
1 Genius original beam current integrator component, rack mounted, with a high circulation of refurbished original parts
2. Measurement and integration of ion beam current specifically for ion implantation machines
3 industrial grade design, rack system compatible with AMAT Genius series equipment
On the market, the main focus is on manufacturer refurbished original factory status
5 is a key measuring component for controlling beam dose in ion implantation process
Product Specifications
Model X6045500
Type 2 rack mounted beam current integrator component
3 brands belong to Genius, which is a subsidiary of AMAT
4-state original factory renovation
Measurement and integration of ion beam current with 5 functions
Product application areas
Beam dose control of ion implantation machine
2. Supporting components for AMAT Genius series ion implantation equipment
Beam monitoring of ion implantation process in semiconductor manufacturing
Replace or refurbish parts during equipment maintenance
Maintenance spare parts for 5 old ion implantation equipment
In short, this component is used for measuring the tube bundle flow in the ion implantation machine, in conjunction with the Genius equipment

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