AMAT 0100-09251多路复用器模块 PDF资料
AMAT 设备里专门负责把传感器和执行器的信号收拢起来，再通过总线传给主控，省掉一大堆硬接线。
产品特点
1 Seriplex SENSORbus 协议的多路复用模拟数字 I/O 板
2 模拟量和数字量都能处理，压力温度限位开关阀门位置都归它管
3 用现场总线通信，布线少，信号还稳
4 带状态指示灯和自检，排查故障不用瞎猜
5 工业级设计，抗干扰和隔离保护都做了
产品参数
1 型号 0100-09251，对应 SPX-MUXADIO-001
2 通信协议是 Seriplex SENSORbus
3 负责模拟和数字信号的采集输出以及跟主控的总线通信
4 带电气隔离，能压住 ESD 浪涌和射频噪声
5 板载 LED 和 BIST 自检，电源总线通道故障都能看出来
产品应用领域
1 AMAT Endura 和 Centura 平台的 PVD CVD 刻蚀腔体本地 I/O 控制
2 300mm 晶圆厂前端设备的信号采集节点
3 腔体维护时替换 Seriplex 总线接口硬件
4 高产量产线关键 AMAT 设备的备件储备
5 老旧 AMAT 多腔体平台的维修和改造
总之这块卡就是个信号中转站，把腔体里的传感器信号收拾干净再传给主控。手里有的话，对着实物核一遍接口和版本，型号对上才安心。
The AMAT device is specifically responsible for collecting signals from sensors and actuators, and then transmitting them to the main control through the bus, saving a lot of hard wiring.
Product Features
1 Seriplex SENSORbus protocol multiplexed analog-to-digital I/O board
Both analog and digital quantities can be processed, and the pressure and temperature limit switches and valve positions are under its control
3. Use fieldbus communication, with less wiring and stable signals
4 with status indicator lights and self check, troubleshooting without guessing
5 industrial grade designs have been made, including anti-interference and isolation protection
Product Specifications
Model 0100-09251, corresponding to SPX-MUXADIO-001
The communication protocol is Seriplex SENSORbus
Responsible for collecting and outputting analog and digital signals, as well as communicating with the main control bus
4 with electrical isolation, capable of suppressing ESD surges and RF noise
On board LED and BIST self-test, power bus channel faults can be detected
Product application areas
Local I/O Control of PVD CVD Etching Chambers on AMAT Endura and Centura Platforms
Signal acquisition nodes for front-end equipment of 2 300mm wafer fabs
Replace Seriplex bus interface hardware during cavity maintenance
Spare parts reserve for key AMAT equipment in high-yield production lines
Maintenance and renovation of 5 old AMAT multi chamber platforms
In short, this card is a signal relay station that cleans up the sensor signals in the cavity before transmitting them to the main control. If you have it in hand, double check the interface and version of the physical object to ensure that the model matches.
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| 710-658909-001 | 8005-NLU-10 | 4136J56-G01 |
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| 710-658340-20 | 8005-LTC-101 | 8030-DLM-110 |
| 710-658232-20 | 8005-LNV-101 | 8030-DIM-101 |
| 710-658232-00 | 8005-EPS-51 | 8030-CRM-931 |
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