Newport 35-3700-1425-18晶圆搬运机器人 PDF资料
Newport 35-3700-1425-18 是 Newport 的 Kensington 系列 300mm 晶圆搬运机器人,配套 Applied Materials(AMAT)设备使用,对应 AMAT 部件号 0190-22248。
特点
300mm 边缘夹持机器人:属于 Newport 300mm 自动边缘夹持机器人系统,采用专利末端执行器,通过晶圆边缘进行夹持搬运。
智能自示教功能:内置光学传感器可检测晶圆存在、测量晶圆位置,并以 0.005 英寸精度计算晶圆中心,具备自示教能力,减少人工示教时间。
配套 AMAT 设备:对应 AMAT 部件号 0190-22248,配套应用材料 Centura 等设备使用。
铜暴露版本:该型号标注为 Copper Exposed(铜暴露),适用于对铜污染不敏感的工艺环境。
状态多样:流通件有未测试按现状(Untested As-Is)和功能正常闲置(Working Surplus)等不同状态。
参数
部件类型:300mm 晶圆搬运机器人
部件号:35-3700-1425-18
AMAT 对应号:0190-22248
适用晶圆尺寸:300mm(12 英寸)
夹持方式:边缘夹持(Edge-Grip)
应用领域
300mm 晶圆自动化传输
AMAT Centura 等设备晶圆搬运
半导体产线晶圆存取与定位
FOUP 晶圆盒晶圆拾取与放置
半导体设备维修与部件替换
结尾说明:Newport 35-3700-1425-18(AMAT 0190-22248)为 300mm 边缘夹持晶圆搬运机器人,配套 AMAT 设备使用,适用于半导体制造中的晶圆自动化传输及设备维修替换。
Newport 35-3700-1425-18晶圆搬运机器人 英文介绍
Newport 35-3700-1425-18 is a Kensington series 300mm wafer handling robot from Newport, used in conjunction with Applied Materials (AMAT) equipment, corresponding to AMAT part number 0190-22248.
Characteristics
300mm edge gripping robot: It belongs to the Newport 300mm automatic edge gripping robot system and uses patented end effectors to grip and transport wafers along their edges.
Intelligent self teaching function: The built-in optical sensor can detect the presence and position of the wafer, and calculate the center of the wafer with an accuracy of 0.005 inches. It has self teaching ability and reduces manual teaching time.
Supporting AMAT equipment: corresponding to AMAT part number 0190-22248, used with supporting materials such as Centura.
Copper Exposed Version: This model is labeled as Copper Exposed and is suitable for process environments that are insensitive to copper pollution.
Diverse states: Circulation items have different states such as Untested As Is and Working Surplus.
parameter
Component type: 300mm wafer handling robot
Part number: 35-3700-1425-18
AMAT corresponding number: 0190-22248
Applicable wafer size: 300mm (12 inches)
Clamping method: Edge Grip
Application Areas
Automated transfer of 300mm wafers
AMAT Centura and other equipment for wafer handling
Semiconductor production line wafer access and positioning
FOUP wafer box wafer picking and placement
Semiconductor equipment maintenance and component replacement
Conclusion: Newport 35-3700-1425-18 (AMAT 0190-22248) is a 300mm edge gripping wafer handling robot designed for use with AMAT equipment. It is suitable for automated wafer transfer and equipment maintenance and replacement in semiconductor manufacturing.
Newport 35-3700-1425-18晶圆搬运机器人

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| 850-EP5NNS5HNNAANGAPCB2ESNBN | AMAT 0100-76290 | 21660559-H DSRA110 ABB |
| 850-EP5NNS5HNNAAFGAPFB3ECNAN | AMAT 0100-11025 | PFCL201CD/CE |
| 850-EP5NNS1HNNAAAGMSFB1ECNBN | CACR-SR1B-E | 57360001-DC DSMC120 ABB |
| 850-EP5NNG5HNNANNGSSFBSEWNBN | CACR-SR03BE12M-E | 5735099-BA DSIH71 ABB |
| 850-EP5NNG5HNNANNGSSFBSENNBN | SERVOSTAR-601 | 48980002-A DSSB120 ABB |
| 850-EP5NNG5HNNANNGSPBCSENNBN | AMAT 0100-94036 | 57360001-HC DSMC112 ABB |
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