Edwards A71003908XS涡旋真空泵 PDF资料
Edwards A71003908XS 是 Edwards GVSP 30 涡旋真空泵,属于无油干式真空泵,目前多以 tested working(已测试功能正常)状态在市场上流通。
特点
GVSP 30 型号:属于 Edwards GVSP 30 系列涡旋真空泵。
Non-Copper 版本:标注为 Non-Copper(非铜),适用于对铜污染敏感的工艺环境。
日本原厂制造:标注 Made in Japan。
测试工作状态:流通件多已测试功能正常,附 90 天保修,但运行小时数未知。
外观有使用痕迹:物理状况良好,但前盖有凹痕,计时器不工作。
参数
型号:GVSP 30
部件号:A71003908XS
电机:Yaskawa EELQ-8ZT
产地:日本
状态:Tested Working(已测试工作)
应用领域
半导体设备真空系统
无油洁净真空获得
对铜污染敏感的工艺环境
涡旋真空泵维修与替换
工业与科研真空应用
结尾说明:Edwards A71003908XS(GVSP 30)为 Non-Copper 涡旋真空泵,适用于半导体等需要洁净无油真空的场景及设备维修替换
The Edwards A71003908XS is an Edwards GVSP 30 vortex vacuum pump, which belongs to the oil-free dry vacuum pump. Currently, it is mostly circulated in the market in a tested working state.
Characteristics
GVSP 30 model: It belongs to the Edwards GVSP 30 series vortex vacuum pump.
Non Copper version: labeled as Non Copper, suitable for process environments sensitive to copper pollution.
Made in Japan: marked as Made in Japan.
Test work status: The circulation parts have been tested and are functioning normally, with a 90 day warranty, but the operating hours are unknown.
Appearance shows signs of use: the physical condition is good, but there are dents on the front cover and the timer is not working.
parameter
Model: GVSP 30
Part number: A71003908XS
Motor: Yaskawa EELQ-8ZT
Origin: Japan
Status: Tested Working
Application Areas
Semiconductor equipment vacuum system
Oil free clean vacuum obtained
Process environment sensitive to copper pollution
Repair and replacement of vortex vacuum pump
Industrial and scientific vacuum applications
Conclusion: Edwards A71003908XS (GVSP 30) is a Non Copper vortex vacuum pump, suitable for semiconductor and other scenarios that require clean and oil-free vacuum, as well as equipment maintenance and replacement

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