ENI 0190-07963发电机叶片 PDF资料
AMAT 0190-07963 是 ENI(现属 MKS)DCG-200A 射频发生器的 Slave(从属)单元,型号为 DC22S-A022000010AL。
特点
ENI DCG-200A 系列:属于 ENI DCG-200 系列射频发生器,型号 DCG-200A。
Slave 从属单元:标注为 Generator SLAVE,需配合主控单元协同工作。
配套 AMAT 设备:以 AMAT 部件号 0190-07963 标识,配套应用材料设备使用。
CE 认证:带 CE 标志,符合欧洲市场安全要求。
测试工作状态:目前流通的该部件多为 tested working(已测试功能正常)状态。
参数
型号:DCG-200A
对应型号:DC22S-A022000010AL
AMAT 部件号:0190-07963
输入电压:三相 200-208VAC
版本:Rev. F
应用领域
AMAT 半导体设备射频功率供电
等离子体工艺射频发生器从属单元
半导体刻蚀与薄膜沉积射频电路
AMAT 设备维修与部件替换
工业射频功率应用场景
结尾说明:AMAT 0190-07963(ENI DCG-200A / DC22S-A022000010AL)为射频发生器从属单元,配套 AMAT 设备使用,适用于半导体等离子体工艺的射频供电及设备维修替换。
ENI 0190-07963发电机叶片 英文介绍
AMAT 0190-07963 is a Slave unit of ENI (now MKS) DCG-200A RF generator, model DC22S-A022000010AL.
Characteristics
ENI DCG-200A series: belongs to the ENI DCG-200 series RF generator, model DCG-200A.
Slave slave unit: labeled as Generator SLAVE, needs to work in conjunction with the master control unit.
Supporting AMAT equipment: identified with AMAT part number 0190-07963, used with supporting materials and equipment.
CE certification: With the CE mark, it meets the safety requirements of the European market.
Test working status: Currently, most of the components in circulation are in the tested working state.
parameter
Model: DCG-200A
Corresponding model: DC22S-A022000010AL
AMAT part number: 0190-07963
Input voltage: three-phase 200-208VAC
Version: Rev. F
Application Areas
AMAT Semiconductor Equipment RF Power Supply
Plasma process RF generator slave unit
Semiconductor etching and thin film deposition for RF circuits
AMAT equipment maintenance and component replacement
Industrial RF power application scenarios
Conclusion: AMAT 0190-07963 (ENI DCG-200A/DC22S-A022000010AL) is a subordinate unit of the RF generator, used in conjunction with AMAT equipment, suitable for RF power supply and equipment maintenance and replacement in semiconductor plasma processes.

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