Brooks Automation 017-0266-01晶圆搬运机器人 PDF资料
Brooks Automation 017-0266-01 是 Brooks 旗下 Reliance ATR 型号的晶圆搬运机器人,目前多以未测试状态(Untested As-Is)在市场上流通。
特点
Reliance ATR 型号:该机器人属于 Brooks Reliance ATR 系列,配套型号 017-0950-01。
高精度搬运:具备高精度定位与搬运能力,确保晶圆在传输过程中完好无损。
自动化控制系统:配备先进自动化控制系统,可实现全自动操作,与产线设备无缝对接。
高负载稳定性:设计可承载较大负载,高速移动时仍保持稳定。
美国原厂制造:标注 Made in the USA,属 Brooks 原厂配套机器人。
参数
型号:Reliance ATR
配套部件号:017-0950-01
适用晶圆尺寸:100mm(4 英寸)
处理能力:最高每小时 230 片晶圆
状态:Untested As-Is(未测试按现状)
应用领域
半导体晶圆自动化搬运
晶圆处理与传送
自动化产线晶圆存取与定位
半导体设备维修与部件替换
洁净室环境晶圆传输
结尾说明:Brooks Automation 017-0266-01(Reliance ATR)为晶圆搬运机器人,适用于半导体制造中的晶圆自动化传输及设备维修替换
Brooks Automation 017-0266-01晶圆搬运机器人 英文介绍
Brooks Automation 017-0266-01 is a wafer handling robot of the Reliance ATR model under Brooks, which is currently circulating in the market in an untested As Is state.
Characteristics
Reliance ATR model: This robot belongs to the Brooks Reliance ATR series and is compatible with model 017-0950-01.
High precision handling: Equipped with high-precision positioning and handling capabilities, ensuring that wafers are intact during transportation.
Automated Control System: Equipped with advanced automation control system, it can achieve fully automatic operation and seamlessly integrate with production line equipment.
High load stability: Designed to withstand large loads and maintain stability even when moving at high speeds.
Made in the USA: marked as Made in the USA, it is a Brooks original factory matching robot.
parameter
Model: Reliance ATR
Supporting part number: 017-0950-01
Applicable wafer size: 100mm (4 inches)
Processing capacity: up to 230 wafers per hour
Status: Untested As Is (as is)
Application Areas
Automated handling of semiconductor wafers
Wafer processing and transportation
Automated production line wafer access and positioning
Semiconductor equipment maintenance and component replacement
Clean room environment wafer transfer
Conclusion: Brooks Automation 017-0266-01 (Reliance ATR) is a wafer handling robot suitable for automated wafer transfer and equipment maintenance and replacement in semiconductor manufacturing
Brooks Automation 017-0266-01晶圆搬运机器人

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