AE 3150861-011射频发生器 PDF资料
AE 3150861-011 是 Advanced Energy(AE)旗下 VHF Ovation 35162 射频发生器,对应 AMAT 部件号 0190-37997。
特点
VHF Ovation 系列:属于 AE 的 VHF Ovation 射频发生器产品线,型号 35162。
配套 AMAT 设备:对应 AMAT 部件号 0190-37997,配套应用材料设备使用。
VHF 频段:属于甚高频(VHF)射频发生器,适用于等离子体工艺激发。
状态多样:目前流通的该型号有未测试闲置件(Untested As-Is)等状态。
射频电源属性:作为射频发生器,负责为等离子体工艺提供射频功率。
参数
型号:VHF Ovation 35162
部件号:3150861-011
AMAT 对应号:0190-37997
制造商:Advanced Energy(AE)
类型:射频发生器
应用领域
AMAT 半导体设备等离子体工艺射频供电
VHF 频段等离子体激发与维持
半导体刻蚀与薄膜沉积射频功率源
AMAT 设备维修与部件替换
半导体设备射频电源配套
结尾说明:AE 3150861-011(VHF Ovation 35162 / AMAT 0190-37997)为射频发生器,配套 AMAT 设备使用,适用于半导体等离子体工艺的 VHF 射频供电及设备维修替换。
AE 3150861-011射频发生器 英文介绍
AE 3150861-011 is a VHF Ovation 35162 RF generator under Advanced Energy (AE), corresponding to AMAT part number 0190-37997.
Characteristics
VHF Ovation series: Belonging to AE's VHF Ovation RF generator product line, model 35162.
Supporting AMAT equipment: corresponding to AMAT part number 0190-37997, used with supporting application materials and equipment.
VHF frequency band: belongs to the very high frequency (VHF) radio frequency generator, suitable for plasma process excitation.
Diverse states: The currently circulating model has untested As Is and other states.
RF power supply attribute: As an RF generator, responsible for providing RF power for plasma processes.
parameter
Model: VHF Ovation 35162
Part number: 3150861-011
AMAT corresponding number: 0190-37997
Manufacturer: Advanced Energy (AE)
Type: RF Generator
Application Areas
AMAT Semiconductor Equipment Plasma Process RF Power Supply
VHF band plasma excitation and maintenance
Semiconductor etching and thin film deposition RF power source
AMAT equipment maintenance and component replacement
RF power supply matching for semiconductor equipment
Conclusion: AE 3150861-011 (VHF Ovation 35162/AMAT 0190-37997) is a radio frequency generator used in conjunction with AMAT equipment, suitable for VHF radio frequency power supply and equipment maintenance and replacement in semiconductor plasma processes.

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