AE 3155132-001射频匹配模块  PDF资料

1.产 品 资 料 介 绍：

AE 3155132-001 是 Advanced Energy（AE）RF Navigator 3013 系列射频匹配模块，配套 Applied Materials（AMAT）设备使用，对应 AMAT 部件号 0190-15168。

特点

1. RF Navigator 3013 系列：属于 AE Navigator 系列射频匹配模块，用于半导体等离子体工艺中的阻抗匹配。

2. 配套 AMAT 设备：对应 AMAT 部件号 0190-15168，配套应用材料刻蚀等设备使用。

3. 原厂翻新状态：目前流通的该型号多为 manufacturer refurbished（原厂翻新件），附带测试文档。

4. CE 认证：带 CE 标志，符合欧洲市场安全要求。

5. 独立匹配模块：作为射频电源与工艺腔室之间的独立匹配单元，负责阻抗调谐。

参数

1. 系列：RF Navigator 3013

2. 部件号：3155132-001

3. AMAT 对应号：0190-15168

4. 制造商：Advanced Energy（AE）

5. 状态：Refurbished（翻新件）

应用领域

1. AMAT 刻蚀设备等离子体腔室阻抗匹配

2. 半导体等离子体工艺射频电路调谐

3. RF 电源与工艺腔室之间的阻抗匹配

4. AMAT 设备射频匹配模块维修与替换

5. 半导体设备射频电路配套单元

结尾说明：AE 3155132-001（AMAT 0190-15168）为 RF Navigator 3013 系列射频匹配模块，配套 AMAT 设备使用，适用于半导体刻蚀等工艺的射频阻抗匹配及设备维修替换。

AE 3155132-001射频匹配模块  英文介绍

AE 3155132-001 is an Advanced Energy (AE) RF Navigator 3013 series RF matching module used in conjunction with Applied Materials (AMAT) equipment, corresponding to AMAT part number 0190-15168.

Characteristics

RF Navigator 3013 series: It belongs to the AE Navigator series RF matching module and is used for impedance matching in semiconductor plasma processes.

Supporting AMAT equipment: Corresponding to AMAT part number 0190-15168, it is used in conjunction with equipment such as material etching.

Original refurbished status: Currently, most of the models in circulation are manufacturer refurbished parts, with accompanying testing documents.

CE certification: With the CE mark, it meets the safety requirements of the European market.

Independent matching module: As an independent matching unit between the RF power supply and the process chamber, responsible for impedance tuning.

parameter

Series: RF Navigator 3013

Part number: 3155132-001

AMAT corresponding number: 0190-15168

Manufacturer: Advanced Energy (AE)

Status: Refurbished

Application Areas

AMAT etching equipment plasma chamber impedance matching

Semiconductor plasma process RF circuit tuning

Impedance matching between RF power supply and process chamber

Maintenance and replacement of AMAT equipment RF matching module

Semiconductor equipment RF circuit supporting unit

Conclusion: AE 3155132-001 (AMAT 0190-15168) is an RF Navigator 3013 series RF matching module designed for use with AMAT equipment. It is suitable for RF impedance matching and equipment maintenance and replacement in semiconductor etching processes.

AE 3155132-001射频匹配模块 

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型号：AE 3155132-001射频匹配模块

质保：一年

成色：全新/二手

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