VAT 65046-PA52-AIW2摆动闸阀  PDF资料

1.产 品 资 料 介 绍：

VAT 65046-PA52-AIW2 是瑞士 VAT 生产的 650 系列摆阀（Pendulum Control & Isolation Gate Valve），属于带控制与隔离功能的真空阀门，用于半导体工艺腔室的下游压力调节。

特点

1. 摆阀结构：阀板通过旋转运动移出开口截面，实现非常精细的传导控制，是工艺腔室下游压力控制的标准方案。

2. 控制与隔离双功能：兼有压力调节和真空隔离功能，是半导体设备下游压力控制的核心阀门。

3. 低振动、低颗粒：开启和关闭动作平稳，设计紧凑，振动小，可避免工艺过程中的颗粒产生。

4. 瑞士原厂制造：由 VAT Vakuumventile AG 在瑞士生产，标注 Made in Switzerland。

5. 工作闲置状态：目前流通的该型号多为 used working surplus（功能正常的闲置件）。

参数

1. 系列：VAT Series 650

2. 公称通径：DN 200（内径约 200mm / 8 英寸）

3. 法兰类型：ISO-F 标准法兰

4. 驱动方式：步进电机驱动

5. 压力范围：最低 1×10⁻⁸ mbar，最高 1.2 bar（绝对压力）

应用领域

1. 半导体刻蚀设备腔室压力调节

2. PVD 与 CVD 薄膜沉积真空管路隔离

3. 平板显示镀膜工艺真空系统

4. 等离子体工艺排气压力稳定控制

5. VAT 650 系列真空阀门维修与替换

结尾说明：VAT 65046-PA52-AIW2 为 650 系列 DN200 步进电机驱动摆阀，具备压力调节与真空隔离双重功能，适用于半导体刻蚀、PVD/CVD 等工艺腔室的下游压力控制及设备维修替换。

VAT 65046-PA52-AIW2摆动闸阀  英文介绍

VAT 65046-PA52-AIW2 is a 650 series Pendulum Control&Isolation Gate Valve produced by Swiss VAT. It is a vacuum valve with control and isolation functions, used for downstream pressure regulation of semiconductor process chambers.

Characteristics

Swing valve structure: The valve plate moves out of the opening section through rotational motion, achieving very precise conduction control, which is the standard solution for downstream pressure control in the process chamber.

Dual function of control and isolation: It has both pressure regulation and vacuum isolation functions, and is the core valve for downstream pressure control of semiconductor equipment.

Low vibration, low particle size: The opening and closing actions are smooth, the design is compact, and the vibration is small, which can avoid particle generation during the process.

Swiss original manufacturing: produced by VAT Vakuumventile AG in Switzerland, labeled as Made in Switzerland.

Idle state of work: Currently, most of the models in circulation are used working surplus (idle parts with normal functions).

parameter

Series: VAT Series 650

Nominal diameter: DN 200 (inner diameter approximately 200mm/8 inches)

Flange type: ISO-F standard flange

Drive mode: stepper motor drive

Pressure range: minimum 1 × 10 ⁻⁸ mbar, maximum 1.2 bar (absolute pressure)

Application Areas

Pressure regulation of semiconductor etching equipment chamber

PVD and CVD thin film deposition vacuum pipeline isolation

Flat panel display coating process vacuum system

Stable control of exhaust pressure in plasma process

VAT 650 series vacuum valve maintenance and replacement

Conclusion: VAT 65046-PA52-AIW2 is a 650 series DN200 stepper motor driven swing valve with dual functions of pressure regulation and vacuum isolation. It is suitable for downstream pressure control and equipment maintenance and replacement in semiconductor etching, PVD/CVD and other process chambers.

VAT 65046-PA52-AIW2摆动闸阀 

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型号：VAT 65046-PA52-AIW2摆动闸阀

质保：一年

成色：全新/二手

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