CTI-Cryogenics 8185156G001导管输入模块  PDF资料

1.产 品 资 料 介 绍：

CTI-Cryogenics 8185156G001 是 On-Board 低温泵系统的 CIM（Cryopump Interface Module，低温泵接口模块），带预冷（Pre Cool）功能。

特点

1. 集成式低温泵控制：CIM 模块负责与低温泵本体通信，实现抽真空、再生等运行控制。

2. 带预冷模块：配置 Pre Cool Module，可在再生或启动阶段辅助快速降温。

3. 微处理器控制：内置微处理器，支持编程与操作多种真空系统功能。

4. 远程与本地操作：支持 RS-232 串口远程控制，也可通过面板键盘/显示进行操作。

5. 多泵组网能力：可通过 On-Board 网络终端实现多台低温泵的统一监控与管理。

参数

1. 部件类型：CIM 接口模块（带预冷功能）

2. 部件号：8185156G001

3. 通信接口：RS-232 标准配置

4. 适用系统：CTI-Cryogenics On-Board 低温泵系统

5. 控制方式：微处理器控制，键盘/显示操作

应用领域

1. 半导体真空工艺：用于刻蚀、PVD、CVD 等需要高真空环境的腔室抽气控制。

2. 平板显示制造：服务于 TFT-LCD/OLED 产线的真空系统。

3. 光学镀膜设备：为镀膜机提供洁净高真空获得与监控。

4. 科研高真空系统：实验室低温泵系统的接口与控制单元。

5. 工业真空镀膜：太阳能薄膜、光纤等领域的真空获得系统。

结尾说明：CTI-Cryogenics 8185156G001 为带预冷功能的 CIM 接口模块，用于 On-Board 低温泵系统的运行控制与监控，适用于半导体、平板显示及光学镀膜等高真空场景。

CTI-Cryogenics 8185156G001导管输入模块   英文介绍

CTI-Cryogenics 8185156G001 is the CIM (Cryopump Interface Module) of the On Board cryogenic pump system, with Pre Cool function.

Characteristics

Integrated low-temperature pump control: The CIM module is responsible for communicating with the low-temperature pump body to achieve operation control such as vacuum pumping and regeneration.

Equipped with a Pre Cool Module: Equipped with a Pre Cool Module to assist in rapid cooling during regeneration or start-up phases.

Microprocessor control: Built in microprocessor, supporting programming and operation of various vacuum system functions.

Remote and local operation: Supports RS-232 serial port remote control, and can also be operated through panel keyboard/display.

Multi pump networking capability: Unified monitoring and management of multiple low-temperature pumps can be achieved through On Board network terminals.

parameter

Component type: CIM interface module (with pre cooling function)

Part number: 8185156G001

Communication interface: RS-232 standard configuration

Applicable System: CTI Kryogenics On Board Low Temperature Pump System

Control mode: microprocessor control, keyboard/display operation

Application Areas

Semiconductor vacuum process: used for chamber vacuum control in etching, PVD, CVD, and other high vacuum environments.

Flat panel display manufacturing: serving vacuum systems for TFT-LCD/OLED production lines.

Optical coating equipment: provides clean high vacuum acquisition and monitoring for coating machines.

Research High Vacuum System: Interface and Control Unit for Laboratory Low Temperature Pump System.

Industrial vacuum coating: a vacuum acquisition system for solar thin films, optical fibers, and other fields.

Conclusion: CTI-Cryogenics 8185156G001 is a CIM interface module with pre cooling function, used for operation control and monitoring of On Board low-temperature pump systems, suitable for high vacuum scenarios such as semiconductors, flat panel displays, and optical coatings.

CTI-Cryogenics 8185156G001导管输入模块 

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型号：CTI-Cryogenics 8185156G001导管输入模块

质保：一年

成色：全新/二手

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