AE 27-339413-00射频匹配模块  PDF资料

1.产 品 资 料 介 绍：

AE 27-339413-00 是 Advanced Energy（AE）RF Navigator 系列射频匹配模块的部件号，属于半导体等离子体工艺中的阻抗匹配单元。

特点

1. 射频阻抗匹配：用于快速完成工艺腔室负载阻抗匹配，确保射频功率高效馈入。

2. 伺服调谐：采用高速伺服调谐机制，负载阻抗变化时快速匹配，减少功率反射。

3. 弧光检测保护：内置弧光检测功能，异常驻波时瞬时保护射频电源与工艺腔室。

4. 风冷结构：采用强制风冷冷却，机架式标准安装，兼容 AMAT 平台机柜。

5. 接口丰富：支持以太网与模拟 IO 接口，可远程读写匹配状态和参数。

参数

1. 设备类型：RF Navigator 射频匹配网络

2. 工作频率：13.56MHz

3. 最大适配射频功率：6000W

4. 冷却方式：强制风冷

5. 工作温度：5-50℃

应用领域

1. AMAT 刻蚀设备等离子体腔室阻抗匹配

2. PVD 磁控溅射薄膜沉积射频电路匹配

3. 半导体去胶与等离子体清洗工艺系统

4. 射频电源与工艺腔室之间的阻抗调谐

5. 半导体量产设备射频电路配套单元

结尾说明：AE 27-339413-00（RF Navigator Rev. A）为 Advanced Energy 射频匹配模块，目前多以 working surplus（功能正常闲置件）形式流通，适用于 AMAT 平台刻蚀、PVD 等半导体设备的维修替换。

AE 27-339413-00射频匹配模块   英文介绍

AE 27-339413-00 is the part number of the Advanced Energy (AE) RF Navigator series RF matching module, which belongs to the impedance matching unit in semiconductor plasma technology.

Characteristics

RF impedance matching: used to quickly match the impedance of the process chamber load, ensuring efficient RF power input.

Servo tuning: Adopting a high-speed servo tuning mechanism, it quickly matches when the load impedance changes, reducing power reflection.

Arc light detection protection: Built in arc light detection function, instantly protects the RF power supply and process chamber in case of abnormal standing waves.

Air cooled structure: using forced air cooling, rack mounted standard installation, compatible with AMAT platform cabinets.

Rich interfaces: Supports Ethernet and analog IO interfaces, and can remotely read and write matching status and parameters.

parameter

Device type: RF Navigator RF Matching Network

Working frequency: 13.56MHz

Maximum adaptive RF power: 6000W

Cooling method: forced air cooling

Working temperature: 5-50 ℃

Application Areas

AMAT etching equipment plasma chamber impedance matching

PVD magnetron sputtering thin film deposition RF circuit matching

Semiconductor Deginding and Plasma Cleaning Process System

Impedance tuning between RF power supply and process chamber

Semiconductor mass production equipment RF circuit supporting unit

Conclusion: AE 27-339413-00 (RF Navigator Rev. A) is an Advanced Energy RF matching module, currently circulating in the form of working surplus (functional idle parts), suitable for maintenance and replacement of semiconductor equipment such as AMAT platform etching and PVD.

AE 27-339413-00射频匹配模块 

3.其他产品

DEIF IPM-1 控制面板
BENTLY 3500/22 288055-01 瞬态数据接口
3BHB006716R0277 SYN 5302a-Z.V277 控制系统模块

4.其他产品

NI PXI-8105 power card
 REF615HCF 2UBA001855R0510 Touch screen
REXROTH HDD02.2-W040N-HD32-01-FW Driver module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com

型号：AE 27-339413-00射频匹配模块

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货