AMAT 0190-51186远程等离子体源  PDF资料

1.产 品 资 料 介 绍：

AMAT 0190-51186是应用材料（Applied Materials）的远程等离子体源，由MKS Instruments制造，具体型号为ASTRON Paragon AX7700-11，主要用于半导体制造中的晶圆清洁和表面处理工艺。

5条产品特点

• 属于MKS Instruments的ASTRON Paragon系列远程等离子体源，由MKS制造，AMAT作为OEM采购

• 采用远程等离子体设计，等离子体在腔室外产生，避免对晶圆表面造成离子轰击损伤

• 用于产生自由基，输送到工艺腔室进行晶圆表面清洁，可去除氧化硅或氮化硅

• 在半导体制造中用于清洁晶圆表面，与传统原位等离子体相比，能减少对基板的物理损伤

• 属于半导体设备的关键组件，常见于二手设备市场，属于可替换的维修备件

5条产品参数

• 型号：0190-51186

• 制造商：MKS Instruments

• 具体型号：ASTRON Paragon AX7700-11

• 品牌：Applied Materials（AMAT）

• 产品类型：远程等离子体源（Remote Plasma Source）

5个应用领域

• 半导体晶圆表面清洁

• 氧化硅、氮化硅去除工艺

• 等离子体增强化学气相沉积（PECVD）

• 半导体设备维修与翻新

• 先进制程中的远程等离子体处理

总的来说，AMAT 0190-51186是MKS Instruments制造的ASTRON Paragon AX7700-11远程等离子体源，作为应用材料设备的OEM组件，在半导体制造中承担晶圆表面清洁和自由基生成任务，是先进制程中减少等离子体损伤的关键组件。

AMAT 0190-51186远程等离子体源   英文介绍

AMAT 0190-51186 is a remote plasma source for Applied Materials, manufactured by MKS Instruments with the specific model ASTRON Paragon AX7700-11. It is mainly used for wafer cleaning and surface treatment processes in semiconductor manufacturing.

5 Product Features

ASTRON Paragon series remote plasma source belonging to MKS Instruments, manufactured by MKS and purchased by AMAT as OEM

Adopting remote plasma design, the plasma is generated outside the chamber to avoid ion bombardment damage to the wafer surface

Used to generate free radicals and transport them to the process chamber for wafer surface cleaning, which can remove silicon oxide or silicon nitride

Used for cleaning wafer surfaces in semiconductor manufacturing, it can reduce physical damage to substrates compared to traditional in-situ plasma

A key component of semiconductor equipment, commonly found in the second-hand equipment market, and a replaceable maintenance spare part

5 product parameters

Model: 0190-51186

Manufacturer: MKS Instruments

Specific model: ASTRON Paragon AX7700-11

Brand: Applied Materials (AMAT)

Product type: Remote Plasma Source

5 application areas

Surface cleaning of semiconductor wafers

Silicon oxide and silicon nitride removal processes

Plasma Enhanced Chemical Vapor Deposition (PECVD)

Semiconductor equipment maintenance and refurbishment

Remote plasma processing in advanced manufacturing processes

Overall, AMAT 0190-51186 is an ASTRON Paragon AX7700-11 remote plasma source manufactured by MKS Instruments. As an OEM component for application material equipment, it undertakes wafer surface cleaning and free radical generation tasks in semiconductor manufacturing, and is a key component for reducing plasma damage in advanced processes.

AMAT 0190-51186远程等离子体源 

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型号：AMAT 0190-51186远程等离子体源

质保：一年

成色：全新/二手

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