MKS 626B11TDE 压力传感器 PDF资料
1.产 品 资 料 介 绍：
MKS 626B11TDE 是 MKS Instruments 采用 Baratron 电容薄膜技术的高精度绝压真空传感器，测量结果与气体类型无关，适用于严苛的真空应用。以下是该型号的核心特点与应用领域：
产品特点
采用 Baratron 电容薄膜技术，测量与气体类型无关。
满量程 10 Torr，覆盖低真空至中真空范围。
提供 0-10 VDC 模拟输出，配备 15 针 D-sub 连接器。
精度 ±0.25% 读数，重复性 ±0.02% FSO。
采用 Inconel 镍合金膜片，耐腐蚀性强。
响应时间小于 20 毫秒。
过压限制 45 psia，具备良好的压力冲击耐受性。
配备 NW16 ISO-KF 标准真空接口。
应用领域
半导体刻蚀与沉积工艺的真空压力监测。
CVD 与 PVD 等薄膜制备过程控制。
工业自动化系统中的真空测量。
腐蚀性气体环境下的压力测量。
科研实验中的高精度真空测量。
光伏与平板显示制程设备。
真空镀膜设备的工艺压力控制。
需要气体类型独立测量的真空过程控制场合。
结尾
综上所述，MKS 626B11TDE 凭借 Baratron 电容薄膜技术、高精度、快速响应及优异的耐腐蚀性，是半导体、工业镀膜及科研等领域中高可靠性真空压力监测的理想选择。
MKS 626B11TDE is a high-precision absolute pressure vacuum sensor developed by MKS Instruments using Baratron capacitive thin film technology. The measurement results are independent of the gas type and are suitable for harsh vacuum applications. The following are the core features and application areas of this model:
Product Features
Using Baratron capacitive thin film technology, the measurement is independent of gas type.
Full range of 10 Torr, covering low to medium vacuum range.
Provide 0-10 VDC analog output, equipped with a 15 pin D-sub connector.
Accuracy ± 0.25% reading, repeatability ± 0.02% FSO.
Using Inconel nickel alloy membrane, it has strong corrosion resistance.
The response time is less than 20 milliseconds.
Overpressure limit of 45 psi, with good pressure shock resistance.
Equipped with NW16 ISO-KF standard vacuum interface.
Application Domain
Vacuum pressure monitoring of semiconductor etching and deposition processes.
Control of thin film preparation processes such as CVD and PVD.
Vacuum measurement in industrial automation systems.
Pressure measurement in corrosive gas environments.
High precision vacuum measurement in scientific research experiments.
Photovoltaic and flat panel display process equipment.
Process pressure control of vacuum coating equipment.
Vacuum process control applications that require independent measurement of gas types.
ending
In summary, MKS 626B11TDE is an ideal choice for high reliability vacuum pressure monitoring in semiconductor, industrial coating, and scientific research fields due to its Baratron capacitor film technology, high precision, fast response, and excellent corrosion resistance.
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RET670 1MRK004816-AC Operation panel
TRICONEX 3511 input interface module
TRICONEX 3625C1 Switch module
| 6ES5998-8MB22 | 531X116SHAAAG1 | 531X308PCSAEG3 |
| 6ES5998-8MA12 | 531X102CCHAEM1 | 740-689986-002 |
| 6ES5998-5SK11 | 26-147415-00 | 073-404369-00 |
| 6ES5998-4ET31 | 531X111PSHAWG2 | 710-652697-00 |
| 6ES5998-3ES52 | 531X111PSHASG1 | 92-005422-OX |
| 6ES5998-2UL24 | 531X111PSHAJG3 | 710-500098-00 |
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