HORIBA SEC-Z511X 质量流量控制器 PDF资料
1.产 品 资 料 介 绍：
HORIBA 型号 SEC-Z511X 质量流量控制器，是一款用于半导体及工业气体精密流量控制的热式质量流量控制器，具备以下特点：
采用热式质量流量传感原理，直接测量质量流量。
流量范围覆盖宽（如0-10 SLM至0-100 SLM可选）。
控制精度高，典型精度为±1%满量程。
响应速度快，设定值变化后1-2秒内完成调节。
工作压差范围宽，适应不同供气压力工况。
全金属密封结构，泄漏率低，安全可靠。
兼容多种腐蚀性及惰性气体（如N₂/Ar/CF₄等）。
配备数字/模拟双模式控制接口，适配性强。
支持DeviceNet或RS-485通讯，便于系统集成。
自带流量设定与反馈显示，现场操作直观。
零点与量程长期稳定，减少频繁校准需求。
内部流道采用高耐腐材质，延长使用寿命。
低功耗设计，发热量小，利于设备散热管理。
结构紧凑轻便，安装方向灵活（多角度可用）。
出厂经严格气密性及流量标定，品质可靠。
结尾
综上，HORIBA SEC-Z511X 质量流量控制器以高精度测量、快速响应及卓越的气体兼容性为核心优势，适用于半导体工艺及精密气体输送场景。
HORIBA model SEC-Z511X mass flow controller is a thermal mass flow controller used for precision flow control of semiconductors and industrial gases, with the following characteristics:
Using the principle of thermal mass flow sensing, directly measure the mass flow rate.
Wide coverage of traffic range (such as 0-10 SLM to 0-100 SLM optional).
High control accuracy, with a typical accuracy of ± 1% of full scale.
Fast response speed, adjust within 1-2 seconds after the set value changes.
Wide range of working pressure difference, suitable for different gas supply pressure conditions.
All metal sealed structure, low leakage rate, safe and reliable.
Compatible with various corrosive and inert gases (such as N ₂/Ar/CF ₄, etc.).
Equipped with digital/analog dual-mode control interface, with strong adaptability.
Supports DeviceNet or RS-485 communication for easy system integration.
Comes with built-in traffic settings and feedback display, providing intuitive on-site operation.
Zero point and range remain stable for a long time, reducing the need for frequent calibration.
The internal flow channel is made of highly corrosion-resistant materials to extend its service life.
Low power design, low heat generation, conducive to device heat management.
Compact and lightweight structure, flexible installation direction (available from multiple angles).
The factory has undergone strict airtightness and flow calibration, ensuring reliable quality.
ending
In summary, the HORIBA SEC-Z511X mass flow controller has the core advantages of high-precision measurement, fast response, and excellent gas compatibility, making it suitable for semiconductor processes and precision gas transportation scenarios.
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| PC844-XYZ-T |  6SC6130-0FE01 | MC-PC1X02 |
| PC844-XYZ-N | 6SC6130-0FE00 | MC-PAOY22 |
| PC844-XYZ-F | 6SC6100-0GB11 | MC-TAIH03 |
| PC844-XYZ-A | 6SC6100-0NA11 | MC-TDIY22 |
| PC844-001-T | 6SC6110-3AA00 | Honeywell |
| PC844-001-N | 6SC6110-0EH02 | MC-GAIH92 |
| PC844-001-F | 6SC6108-0SG02 | MC-GAIH84 |
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