NOVELLUS 02-281592-00 数字动态控制器 PDF资料
1.产 品 资 料 介 绍：
NOVELLUS 02-281592-00 数字动态控制器 是专为半导体薄膜沉积设备设计的核心控制模块，用于动态调节腔体内的等离子体、气路及温度参数，确保工艺均匀稳定。
采用高速数字信号处理，实时调节工艺参数。
多通道同步采集压力、温度、流量信号。
内置光电隔离，抗射频电磁干扰。
多层屏蔽PCB设计，降低杂波影响。
闭环PID控制，抑制参数波动。
硬件安全互锁，过温过压自动切断。
标准插卡式结构，便于机柜拆装。
采用原厂专属通讯协议，对接免调试。
本地存储多组工艺配方，断电不丢失。
多通道数字IO输出，控制阀组、加热、射频单元。
状态指示灯显示运行、报警、待机。
符合洁净室等级，适用于晶圆车间。
支持0-50°C连续24小时运行。
具备过压、过流、短路三重保护。
兼容NOVELLUS系列PVD/CVD设备。
总的来说，NOVELLUS 02-281592-00 数字动态控制器
NOVELLUS 02-281592-00 数字动态控制器 英文介绍
The NOVELLUS 02-281592-00 digital dynamic controller is a core control module designed specifically for semiconductor thin film deposition equipment. It is used to dynamically adjust the plasma, gas path, and temperature parameters inside the chamber to ensure uniform and stable processes.
Adopting high-speed digital signal processing to adjust process parameters in real-time.
Multi channel synchronous acquisition of pressure, temperature, and flow signals.
Built in photoelectric isolation, resistant to radio frequency electromagnetic interference.
Multi layer shielding PCB design to reduce the impact of clutter.
Closed loop PID control to suppress parameter fluctuations.
Hardware safety interlock, automatic cut-off for over temperature and over voltage.
Standard plug-in card structure, easy to disassemble and assemble the cabinet.
Adopting the exclusive communication protocol of the original factory, docking is free of debugging.
Store multiple sets of process formulas locally without losing them during power outages.
Multi channel digital IO output, control valve group, heating, RF unit.
The status indicator light displays running, alarm, and standby.
Compliant with cleanroom standards and suitable for wafer workshops.
Supports continuous 24-hour operation at 0-50 ° C.
Equipped with triple protection against overvoltage, overcurrent, and short circuit.
Compatible with NOVELLUS series PVD/CVD equipment.
Overall, NOVELLUS 02-281592-00 digital dynamic controller
NOVELLUS 02-281592-00 数字动态控制器 产品图片
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