TEL 3281-000080-13 输入输出模块 PDF资料
1.产 品 资 料 介 绍：
TEL 3281-000080-13 输入输出模块
- 具备多路数字、模拟信号通道，采集腔体压力、舱门、限位传感器信号
- 输出控制阀门、真空泵、加热组件、晶圆传输机构等外设
- 搭载光电隔离电路，抵御等离子环境带来的电磁干扰
- 板载滤波元件，减少信号杂波，防止设备误触发动作
- 背板直插式安装，拆装更换便捷，无需改动原有接线
- 各通道配备独立指示灯，快速排查线路与信号故障
- 采用工业耐温元器件，可全天候不间断稳定运行
- 单通道设有独立短路、过载保护，局部故障不影响整板工作
- 兼容设备原厂内部总线，实时传输腔体工艺数据至主控
- 内置安全联锁程序，真空、舱门异常时自动停机防护
- 板面带有三防涂层，防尘防潮，适配无尘洁净车间环境
- 线路分区布局，强弱电信号分开布线，避免互相干扰
- 自带开机自检功能，方便日常故障检测与维护
- 基材耐高温，高低温工艺环境下信号采集无偏移
- 出厂完成全部电性调试校准，上机即可匹配机台使用结尾：TEL 3281-000080-13 适配 TEL 刻蚀、薄膜沉积设备，信号传输稳定，替换兼容性好。
TEL 3281-000080-13 输入输出模块 英文介绍
TEL 3281-000080-13 Input/Output Module
Introduction: TEL 3281-000080-13 is a specialized IO board for semiconductor process equipment at Tokyo Electronics, used for machine signal acquisition and action control. It is a commonly used replacement part for maintenance.
Equipped with multiple digital and analog signal channels, collecting signals from chamber pressure, cabin door, and limit sensors
External devices such as output control valves, vacuum pumps, heating components, wafer transfer mechanisms, etc
Equipped with optoelectronic isolation circuit to resist electromagnetic interference caused by plasma environment
Onboard filtering components reduce signal clutter and prevent equipment from triggering actions incorrectly
Backboard direct insertion installation, easy disassembly and replacement, no need to modify the original wiring
Each channel is equipped with independent indicator lights to quickly troubleshoot circuit and signal faults
Using industrial temperature resistant components, it can operate continuously and stably 24/7
The single channel is equipped with independent short circuit and overload protection, and local faults do not affect the overall operation of the board
Compatible with the original factory internal bus of the device, real-time transmission of cavity process data to the main control
Built in safety interlock program, automatic shutdown protection in case of vacuum or cabin door abnormalities
The board surface is equipped with a three proof coating, which is dustproof and moisture-proof, and suitable for dust-free and clean workshop environments
Line partition layout, separate strong and weak electrical signals to avoid mutual interference
Equipped with a built-in power on self-test function, convenient for daily fault detection and maintenance
The substrate is resistant to high temperatures, and there is no offset in signal acquisition under high and low temperature process environments
After completing all electrical debugging and calibration at the factory, it can be matched with the machine for use on the machine
Conclusion: TEL 3281-000080-13 is compatible with TEL etching and thin film deposition equipment, with stable signal transmission and good replacement compatibility.
TEL 3281-000080-13 输入输出模块 产品图片
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| STF3640-4977-61-56BC | SC403-014 | SC933-001-NN-01 |
| STF3624-5604-61-56C | SC402-024-T2 | SC933-001-01 |
| STF3624-4976-61-56BC | SC403-013-T2 | SC753A-040-08 |
| STC3720-4085-56C | SC403-013-T4 | SC90200101NNN |
| SRF5570-4986-84-5-82BC-CU | SC403-001-T1 | SC933-NN-001-01 |
| SRF5570-4483-84-82BC | SC402-001-T4 | SC756B-001-01 |
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