MKS002-4616-2D2 气体分析仪 PDF资料 

1.产 品 资 料 介 绍：

MKS002-4616-2D2 气体分析仪为MKS品牌e-Vision系列通用残余气体分析仪（RGA），专用于半导体及工业领域的气体成分检测与过程监控，采用先进质谱分析技术，检测精度高、响应迅速。其主要特点如下：

中间（15条）

1. 原厂型号MKS002-4616-2D2，来源清晰可追溯

2. 品牌为MKS Instruments，残余气体分析领域全球领先

3. 属于e-Vision系列通用残余气体分析仪（RGA）

4. 采用四极质谱分析技术，检测结果准确可靠

5. 支持ppm级微量气体浓度检测，灵敏度高

6. 全量程动态范围内数据采集速度快，毫秒级响应

7. 具备双灯丝设计，确保关键监测过程不停机

8. 支持多种质量范围配置（100/200/300 amu）

9. 配备法拉第检测器，部分型号可选微通道板倍增器

10. 内置Web控制界面，通过浏览器即可操作控制

11. 支持Modbus TCP/IP及ASCII协议通讯，集成方便

12. 烘烤温度最高可达250°C，适应真空环境使用

13. 半导体级真空法兰接口（DN 40 CF），安装规范

14. 适用于半导体工艺腔体残余气体分析与终点检测

15. 电源需求为24 VDC，功耗低，配套通用电源适配器

结尾

综上，MKS002-4616-2D2 气体分析仪具有型号清晰、检测灵敏、响应快速、通讯灵活且适合半导体集成应用等特点，是真空工艺过程气体监测与残余气体分析的可靠选择。

MKS002-4616-2D2 气体分析仪 英文介绍

The MKS002-4616-2D2 gas analyzer is a MKS brand e-Vision series universal residual gas analyzer (RGA), specifically designed for gas composition detection and process monitoring in the semiconductor and industrial fields. It adopts advanced mass spectrometry analysis technology, with high detection accuracy and rapid response. Its main characteristics are as follows:

Middle (15 items)

Original model MKS002-4616-2D2, with clear and traceable source

The brand is MKS Instruments, a global leader in residual gas analysis

Belonging to the e-Vision series universal residual gas analyzer (RGA)

Using quadrupole mass spectrometry analysis technology, the detection results are accurate and reliable

Support ppm level trace gas concentration detection with high sensitivity

Fast data acquisition speed and millisecond response within the full range dynamic range

Featuring a dual filament design to ensure uninterrupted critical monitoring processes

Support multiple quality range configurations (100/200/300 amu)

Equipped with Faraday detector, some models can choose microchannel plate multiplier

Built in web control interface, which can be operated and controlled through a browser

Supports Modbus TCP/IP and ASCII protocol communication, easy integration

The highest baking temperature can reach 250 ° C, suitable for use in vacuum environments

Semiconductor grade vacuum flange interface (DN 40 CF), installation specifications

Suitable for residual gas analysis and endpoint detection in semiconductor process chambers

The power requirement is 24 VDC, with low power consumption, and comes with a universal power adapter

ending

In summary, the MKS002-4616-2D2 gas analyzer has the characteristics of clear model, sensitive detection, fast response, flexible communication, and suitability for semiconductor integration applications. It is a reliable choice for gas monitoring and residual gas analysis in vacuum process.

MKS002-4616-2D2 气体分析仪 产品图片

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型号：MKS002-4616-2D2 气体分析仪

质保：一年

成色：全新/二手

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