LAM 853-064887-010 匹配器    PDF资料 

1.产 品 资 料 介 绍：

LAM 853-064887-010 匹配器是半导体刻蚀设备中用于射频能量高效传输的核心单元，采用自动阻抗匹配技术，确保功率稳定耦合至工艺腔室。

中间15条特点：

1. 原厂LAM Research配套部件，与设备深度兼容

2. 实时自动调整阻抗，降低反射功率

3. 保护射频发生器免受高反射功率损伤

4. 匹配响应速度快，适应等离子体负载变化

5. 采用真空可变电容器等精密调谐元件

6. 具备闭环控制，调节精度高

7. 适用于刻蚀、沉积等工艺环境

8. LAM 853-064887-010 备件状态良好，可直接替换同型号故障件

9. 满足产线日常维护及应急替换需求

10. 结构紧凑，适配LAM标准设备接口

11. 散热设计合理，保障长期运行稳定性

12. 与主控系统实时通信，状态可监控

13. 内置过压、过流保护功能

14. 具备驻波比超限保护逻辑

15. LAM 853-064887-010 符合半导体洁净室使用规范

结尾：
LAM 853-064887-010 性能可靠、功能完备，是保障LAM刻蚀设备稳定运行的关键备件。该型号匹配器在产线维护中具有重要实用价值。

LAM 853-064887-010 匹配器     英文介绍

The LAM 853-064887-010 adapter is the core unit used for efficient transmission of RF energy in semiconductor etching equipment. It adopts automatic impedance matching technology to ensure stable power coupling to the process chamber.

The 15 characteristics in the middle:

Original LAM Research supporting components, deeply compatible with equipment

Real time automatic impedance adjustment to reduce reflected power

Protect the RF generator from high reflection power damage

Fast matching response speed, adaptable to changes in plasma load

Using precision tuning components such as vacuum variable capacitors

Equipped with closed-loop control and high adjustment accuracy

Suitable for etching, deposition and other process environments

LAM 853-064887-010 spare parts are in good condition and can be directly replaced with faulty parts of the same model

Meet the daily maintenance and emergency replacement needs of the production line

Compact structure, compatible with LAM standard equipment interface

Reasonable heat dissipation design ensures long-term operational stability

Real time communication with the main control system, status can be monitored

Built in overvoltage and overcurrent protection functions

Equipped with standing wave ratio over limit protection logic

LAM 853-064887-010 complies with semiconductor cleanroom usage standards

ending:

LAM 853-064887-010 has reliable performance and complete functions, and is a key spare part to ensure the stable operation of LAM etching equipment. This model of matching device has important practical value in production line maintenance.

LAM 853-064887-010 匹配器    产品图片

3.其他产品

UAC389AE02 数字量输出模块
PROSOFT MVI46-MCM 通讯模块
AB 1756-IF16 模拟输入模块 

4.其他英文产品

LWN1902-6 input logic module
LWN2660-6 Output logic module
UFC760BE102 3BHB007030R0102 Thermocouple module

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型号：LAM 853-064887-010 匹配器  

质保：一年

成色：全新/二手

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