Novellus 02-252395-00 数字动力控制系统 PDF资料
1.产 品 资 料 介 绍：
Novellus 02-252395-00 数字动力控制系统
- Novellus 02-252395-00 为半导体 CVD 沉积设备专用动力控制单元
- 数字化闭环调控供电输出，功率控制精度高
- 多路动力通道同步输出，匹配腔体加热、射频负载
- 内置电磁滤波，抵御洁净车间电磁干扰
- 多类工业通讯接口，对接整机主控系统
- 实时采集电压电流数据，动态修正输出参数
- 自带硬件故障自检，过载异常快速报警
- 工业宽温机身，适配设备长期连续运转
- 全金属密封壳体，防尘防潮延缓老化
- 多重过压、过流、过热安全防护电路
- 标准机柜安装尺寸，拆装替换便捷
- 大容量存储，保存多套工艺动力配方
- 抗震加固内部结构，耐受产线震动工况
- 信号电气隔离，降低设备短路故障风险
- 完美适配 Novellus 全系薄膜沉积晶圆设备总结：Novellus 02-252395-00 数字动力控制系统调控精准、防护完善，是半导体薄膜工艺设备核心动力管控配件。
Novellus 02-252395-00 数字动力控制系统 英文介绍
Novellus 02-252395-00 is a specialized digital power control system for thin film deposition equipment, with precise digital regulation that coordinates the power output and process power logic of each machine.
1. Fully digital PID control, with minimal power output fluctuations
2. Multiple power channels are independently controlled, and power supply in different zones does not interfere with each other
3. Digital filtering circuit to resist electromagnetic interference in clean rooms
4. Wide temperature stable operation, suitable for high and low temperature process environments of equipment
5. Gold plated communication terminal, long-term plug-in without contact offset
6. Millisecond level dynamic response, fast load changes, stable voltage and current
7. Built in fault self check, real-time alarm for overcurrent, overvoltage, and overheating
8. Reinforced plate structure to withstand continuous vibration conditions of the machine
9. Sealed dustproof and moisture-proof design, delaying internal circuit aging
10. Standard rack plug-in structure, easy maintenance and replacement
11. Multiple power protection, automatic cut-off of output in case of abnormalities to prevent burning out
12. Multiple sets of process parameter storage, one click switching of deposition formula
13. Digital communication bus, connected to the main control system of the whole machine
14. High energy conversion efficiency and low temperature rise during the operation of the whole machine
15. Original factory long-term aging test, supporting 7 × 24-hour uninterrupted work
Conclusion: The power control of Novellus 02-252395-00 is stable and reliable, and it is the core power control unit of Novellus thin film deposition equipment.
Novellus 02-252395-00 数字动力控制系统 产品图片
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EMERSON VE4006P2 控制器模块
3ASC25H219B DATX133 Digital output module
FOXBORO 0303443B Valve position control card
FOXBORO 0303458A Output logic card
| 073-451126-00 | 531X302DCIBAG3 | 6DD1684-0CH0 |
| 073-404555-00 | 03-10639-00 | 19-00130-00 |
| 073-404423-00 |  02-00152-00 | 03-056746-00 |
| 073-404337-00 | 193X802AAG01 | 6DD1684-0FD0 |
| 073-404227-00 | 6DD1684-0DB2 | 6DD1684-0GH0 |
| 073-404145-00 | 531X304IBDASG1 | 6SC6100-0AB80 |
| 0644536-000 | 531X304IBDARG1 | 6DD1684-0GF0 |
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