ENI GHW12Z-13DF2N0-001射频发生器 PDF资料
ENI GHW12Z-13DF2N0-001是ENI（后被MKS Instruments收购）Genesis GHW系列的一款射频发生器，最大输出功率12.5kW，频率13.56MHz，主要用于半导体制造中的等离子体工艺设备，如AMAT Endura平台。
5条产品特点
属于ENI Genesis GHW系列射频发生器，原厂已停产，市场上以库存替换件和维修服务为主
输出功率12.5kW，频率13.56MHz，属于工业标准射频频率
采用三相380-480VAC输入，适配工业供电环境
配套AMAT Endura平台使用，是应用材料设备的重要组件
常见于二手半导体设备市场，属于可替换的维修备件
5条产品参数
型号：GHW12Z-13DF2N0-001
产品系列：Genesis GHW-12
输出功率：12.5kW
输出频率：13.56MHz
输入电压：三相380-480VAC，50/60Hz
5个应用领域
半导体等离子体蚀刻设备
等离子体增强化学气相沉积（PECVD）
高密度等离子体CVD（HDPCVD）
半导体设备维修与翻新
真空镀膜与薄膜沉积设备
总的来说，ENI GHW12Z-13DF2N0-001是Genesis GHW系列的一款12.5kW、13.56MHz射频发生器，主要配套AMAT Endura平台使用，在半导体等离子体工艺中承担射频功率输出任务，是蚀刻和沉积设备里的常见配套模块。
ENI GHW12Z-13DF2N0-001射频发生器 英文介绍
ENI GHW12Z-13DF2N0-001 is an RF generator from the Genesis GHW series of ENI (later acquired by MKS Instruments), with a maximum output power of 12.5kW and a frequency of 13.56MHz. It is mainly used in plasma process equipment in semiconductor manufacturing, such as the AMAT Endura platform.
5 Product Features
Belonging to the ENI Genesis GHW series RF generator, the original factory has ceased production, and the market mainly focuses on inventory replacement parts and maintenance services
Output power of 12.5kW, frequency of 13.56MHz, belonging to the industrial standard RF frequency
Adopting three-phase 380-480VAC input, suitable for industrial power supply environment
Used in conjunction with the AMAT Endura platform, it is an important component of application material equipment
Commonly seen in the second-hand semiconductor equipment market, it belongs to replaceable maintenance spare parts
5 product parameters
Model: GHW12Z-13DF2N0-001
Product Series: Genesis GHW-12
Output power: 12.5kW
Output frequency: 13.56MHz
Input voltage: three-phase 380-480VAC, 50/60Hz
5 application areas
Semiconductor plasma etching equipment
Plasma Enhanced Chemical Vapor Deposition (PECVD)
High density plasma CVD (HDPCVD)
Semiconductor equipment maintenance and refurbishment
Vacuum coating and thin film deposition equipment
Overall, ENI GHW12Z-13DF2N0-001 is a 12.5kW, 13.56MHz RF generator from the Genesis GHW series, mainly used in conjunction with the AMAT Endura platform. It is responsible for RF power output in semiconductor plasma processes and is a common module in etching and deposition equipment.
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