NSK 51161-802-001接口机器人 PDF资料
NSK 51161-802-001是东京电子（TEL）Clean Track Lithius系统里的接口机器人，具体是IRAM（Interface Robot Arm Main）接口机械臂主单元，内部集成了NSK的伺服电机和直线运动模块。
5条产品特点
属于TEL Clean Track Lithius系统的原装接口机器人组件，由NSK提供核心运动部件
内部集成NSK机器人伺服电机，型号为M-SSB020FN502
配套NSK直线运动滑台模块，型号为XY-HRS025ZRS202
采用300mm晶圆叉，用于晶圆传输接口的搬运作业
日本制造，是TEL涂胶显影设备中的关键传输部件
5条产品参数
型号：51161-802-001
产品类型：接口机器人（Interface Block Robot）
适用设备：TEL Clean Track Lithius系统
内部伺服电机型号：NSK M-SSB020FN502
内部直线滑台型号：NSK XY-HRS025ZRS202
5个应用领域
半导体涂胶显影设备
晶圆传输与接口系统
TEL Lithius系统维修与翻新
晶圆制造产线维护
半导体设备替换备件
总的来说，NSK 51161-802-001是TEL Lithius涂胶显影设备里的接口机器人，核心运动部件由NSK提供，包括伺服电机和直线滑台模块，在半导体制造中承担晶圆传输任务
NSK 51161-802-001 is an interface robot in the Clean Track Lithium system of Tokyo Electronics (TEL), specifically the IRAM (Interface Robot Arm Main) interface robotic arm main unit, which integrates NSK's servo motor and linear motion module internally.
5 Product Features
Original interface robot components belonging to TEL Clean Track Lithium system, with core moving parts provided by NSK
Internally integrated NSK robot servo motor, model M-SSB020FN502
Supporting NSK linear motion slide module, model XY-HRS025ZRS202
Using 300mm wafer forks for wafer transfer interface handling operations
Made in Japan, it is a key transmission component in TEL coating and developing equipment
5 product parameters
Model: 51161-802-001
Product type: Interface Block Robot
Applicable equipment: TEL Clean Track Lithium system
Internal servo motor model: NSK M-SSB020FN502
Internal Linear Sliding Platform Model: NSK XY-HRS025ZRS202
5 application areas
Semiconductor coating and developing equipment
Wafer Transfer and Interface System
TEL Lithium System Maintenance and Renovation
Maintenance of wafer manufacturing production line
Replacement parts for semiconductor equipment
In general, NSK 51161-802-001 is an interface robot in TEL Lithium's coating and developing equipment. The core moving parts are provided by NSK, including servo motors and linear slide modules, which undertake wafer transfer tasks in semiconductor manufacturing
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| PFTL301E | AMAT 0100-35279 | PFTL 201C-10.0KN |
| PFTL201DE | AMAT 0100-11018 | PFTL 201C-50.0KN |
| PFTL201D | AMAT 0100-09001 | PFTL 201DE-50.0KN |
| PFTL201CE | AMAT 0100-00611 | PFTL 101A-2.0KN |
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