AE 3150017-026射频发生器 PDF资料

1.产 品 资 料 介 绍：

AE 3150017-026是Advanced Energy（AE）旗下RFPP RF Power Products的RF30S射频发生器，输出功率3000W，频率13.56MHz，美国制造，是一款用于等离子体工艺的工业级射频电源。

5条产品特点

• 属于RFPP RF30S系列射频发生器，由Advanced Energy生产

• 输出功率3000W，频率13.56MHz，属于工业标准射频频率

• 采用水冷设计，适合长时间连续运行

• 需要远程联锁信号才能正常工作，属于设备安全保护设计

• 作为OEM嵌入式模块，通常配套半导体制造设备使用

5条产品参数

• 型号：3150017-026

• 产品系列：RF30S / RFPP

• 输出功率：3000W

• 输出频率：13.56MHz

• 输入电压：三相208VAC，50/60Hz

• 冷却方式：水冷

5个应用领域

• 半导体等离子体蚀刻设备

• 等离子体增强化学气相沉积（PECVD）

• 射频功率放大与传输系统

• 半导体设备维修与翻新

• 真空镀膜与薄膜沉积设备

总的来说，AE 3150017-026是Advanced Energy RF30S系列的一款3000W、13.56MHz射频发生器，采用水冷设计，主要用在半导体等离子体工艺设备中承担射频功率输出任务，是蚀刻和沉积设备里的常见配套模块。

AE 3150017-026射频发生器  英文介绍

AE 3150017-026 is an RF30S RF generator from RFPP RF Power Products under Advanced Energy (AE), with an output power of 3000W and a frequency of 13.56MHz. It is manufactured in the United States and is an industrial grade RF power supply used in plasma processes.

5 Product Features

Belonging to the RFPP RF30S series RF generator, produced by Advanced Energy

Output power 3000W, frequency 13.56MHz, belonging to the industrial standard RF frequency

Adopting water-cooled design, suitable for long-term continuous operation

Remote interlocking signals are required for normal operation, which belongs to equipment safety protection design

As an OEM embedded module, it is usually used in conjunction with semiconductor manufacturing equipment

5 product parameters

Model: 3150017-026

Product Series: RF30S/RFPP

Output power: 3000W

Output frequency: 13.56MHz

Input voltage: Three phase 208VAC, 50/60Hz

Cooling method: Water cooling

5 application areas

Semiconductor plasma etching equipment

Plasma Enhanced Chemical Vapor Deposition (PECVD)

RF power amplification and transmission system

Semiconductor equipment maintenance and refurbishment

Vacuum coating and thin film deposition equipment

Overall, AE 3150017-026 is a 3000W, 13.56MHz RF generator from the Advanced Energy RF30S series, designed with water cooling. It is mainly used in semiconductor plasma process equipment to perform RF power output tasks and is a common supporting module in etching and deposition equipment.

AE 3150017-026射频发生器  产品图片

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型号：AE 3150017-026射频发生器

质保：一年

成色：全新/二手

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