ENI OEM-6B-01M3射频发生器  PDF资料

1.产 品 资 料 介 绍：

ENI OEM-6B-01M3是ENI Power Systems出品的一款射频发生器，输出功率650W，频率13.56MHz，属于OEM-6B系列，常见于半导体设备和等离子体处理系统中。

5条产品特点

• 输出功率650W，频率13.56MHz，属于工业标准射频频率

• 属于ENI OEM-6B系列射频发生器，结构紧凑，适合集成到设备机柜中

• 设计用于等离子体工艺设备，为蚀刻、沉积等工艺提供射频功率

• 需要远程联锁信号才能正常工作，属于设备安全保护设计的一部分

• 作为OEM嵌入式模块，通常配套半导体制造设备使用

5条产品参数

• 型号：OEM-6B-01M3

• 产品系列：OEM-6B

• 输出功率：650W

• 输出频率：13.56MHz

• 品牌：ENI Power Systems

5个应用领域

• 半导体等离子体蚀刻设备

• 等离子体增强化学气相沉积（PECVD）

• 射频功率放大与传输系统

• 半导体设备维修与翻新

• 真空镀膜与薄膜沉积设备

总的来说，ENI OEM-6B-01M3是一款650W、13.56MHz的射频发生器，属于ENI OEM-6B系列，主要用在半导体等离子体工艺设备中承担射频功率输出任务，是蚀刻和沉积设备里的常见配套模块。

ENI OEM-6B-01M3射频发生器   英文介绍

ENI OEM-6B-01M3 is an RF generator produced by ENI Power Systems, with an output power of 650W and a frequency of 13.56MHz. It belongs to the OEM-6B series and is commonly used in semiconductor equipment and plasma processing systems.

5 Product Features

Output power 650W, frequency 13.56MHz, belonging to the industrial standard RF frequency

Belonging to the ENI OEM-6B series RF generator, it has a compact structure and is suitable for integration into equipment cabinets

Designed for plasma process equipment to provide RF power for etching, deposition, and other processes

Remote interlocking signals are required for normal operation, which is part of the equipment safety protection design

As an OEM embedded module, it is usually used in conjunction with semiconductor manufacturing equipment

5 product parameters

Model: OEM-6B-01M3

Product Series: OEM-6B

Output power: 650W

Output frequency: 13.56MHz

Brand: ENI Power Systems

5 application areas

Semiconductor plasma etching equipment

Plasma Enhanced Chemical Vapor Deposition (PECVD)

RF power amplification and transmission system

Semiconductor equipment maintenance and refurbishment

Vacuum coating and thin film deposition equipment

Overall, ENI OEM-6B-01M3 is a 650W, 13.56MHz RF generator belonging to the ENI OEM-6B series. It is mainly used in semiconductor plasma process equipment to undertake RF power output tasks and is a common supporting module in etching and deposition equipment.

ENI OEM-6B-01M3射频发生器  产品图片

3.其他产品

UNIOP ETOP30-4550操作接口面板
GE RS-FS-9001 火焰探测器
HIMA H6200A 发射器电路

4.其他产品

 PFSK112 YM322001-ES Output channel card
 PFSK115 YM322001-EX Input channel card
 YPK110E Input channel card

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:https://www.jiangxidcs.com

型号：ENI OEM-6B-01M3射频发生器

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货