Nihon Koshusha HFS-450-020-5发电机 PDF资料
Nihon Koshusha HFS-450-020-5是一款450MHz、2kW的射频发生器,属于Nihon Koshuha(日本高周波)的产品,常与Hitachi MU-712E浅槽蚀刻系统配套使用。
5条产品特点
输出频率为450MHz,功率2kW,属于高频大功率射频电源
由日本Nihon Koshuha公司制造,该公司自1932年起专注电磁波技术领域
主要用于半导体制造设备,为蚀刻工艺提供射频功率
配套Hitachi MU-712E浅槽蚀刻系统使用,是该系统的重要组件
属于工业级射频发生器,设计用于洁净室环境下的连续运行
5条产品参数
型号:HFS-450-020-5
输出功率:2kW
输出频率:450MHz
输入电压:三相200VAC,50/60Hz
产地:日本
5个应用领域
半导体浅槽蚀刻设备
等离子体处理系统
射频功率放大与传输
半导体设备维修与翻新
真空镀膜与薄膜沉积设备
总的来说,Nihon Koshusha HFS-450-020-5是日本高周波公司生产的450MHz射频发生器,主要配套Hitachi MU-712E浅槽蚀刻系统使用,在半导体等离子体工艺中承担射频功率输出的关键角色。
Nihon Koshusha HFS-450-020-5发电机 英文介绍
Nihon Koshusha HFS-450-020-5 is a 450MHz, 2kW RF generator belonging to Nihon Koshusha (Japan High Frequency), commonly used in conjunction with Hitachi MU-712E shallow groove etching system.
5 Product Features
Output frequency is 450MHz, power is 2kW, belonging to high-frequency high-power RF power supply
Made by Nihon Koshuha Company in Japan, which has been focusing on electromagnetic wave technology since 1932
Mainly used in semiconductor manufacturing equipment to provide RF power for etching processes
Used in conjunction with the Hitachi MU-712E shallow groove etching system, it is an important component of the system
Belonging to industrial grade RF generators, designed for continuous operation in cleanroom environments
5 product parameters
Model: HFS-450-020-5
Output power: 2kW
Output frequency: 450MHz
Input voltage: three-phase 200VAC, 50/60Hz
Origin: Japan
5 application areas
Semiconductor shallow groove etching equipment
Plasma processing system
RF power amplification and transmission
Semiconductor equipment maintenance and refurbishment
Vacuum coating and thin film deposition equipment
Overall, Nihon Koshusha HFS-450-020-5 is a 450MHz RF generator produced by Nippon High Frequency Corporation, mainly used in conjunction with Hitachi MU-712E shallow groove etching system, and plays a key role in RF power output in semiconductor plasma processes.
Nihon Koshusha HFS-450-020-5发电机 产品图片

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| PMA55R-00100-00 | 38SC98000HR615 | PFCL201 10.0KN |
| PMA55Q-10100-00 | AMAT 0100-01098 | 3BSE000863R1 SR511 |
| PMA54R-10100-00 | 70 AS 04b-E | PFTL101AE 0.5KN 3BSE004211R1 |
| PMA54R-00100-00 | NIMP01 | N31HLLJ-LNK-NS-00 |
| PMA54Q-11100-00 | AMAT 0100-00397 | PFRL101D 5.0KN 3BSE002969R0002 |
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