Varian 9698922S001涡轮真空泵  PDF资料

1.产 品 资 料 介 绍：

Varian 9698922S001涡轮真空泵是Varian（现属Agilent）Turbo-V 551 Navigator系列的高真空泵，采用DN 160 ISO-K法兰接口，抽速550 L/s，是一款性能可靠、维护成本低的涡轮分子泵。

5条产品特点

• 采用高强度铝合金整体加工叶轮，配备8级叶片和4级MacroTorr拖动级

• 内置永久润滑陶瓷球轴承，安装在真空侧，无需维护

• 配备Navigator智能控制器，可根据系统需求自动优化泵性能

• 支持任意方向安装，可水冷或风冷

• 对轻气体具有高压缩比，前级压力耐受性高

5条产品参数

• 型号：9698922S001

• 产品系列：Turbo-V 551 Navigator

• 进气口法兰：DN 160 ISO-K

• 前级法兰：KF 25 NW

• 抽速（N2）：550 L/s

5个应用领域

• 扫描电子显微镜（SEM）等电子显微分析设备

• 质谱分析仪器

• 离子束系统与离子注入设备

• 表面分析系统

• 玻璃镀膜与半导体制造

总的来说，Varian 9698922S001是Turbo-V 551 Navigator系列涡轮分子泵，结构成熟、性能稳定，在电子显微、质谱分析和半导体制造等对真空要求苛刻的领域应用广泛，是一款经典的高真空泵型号。

Varian 9698922S001涡轮真空泵   英文介绍

The Varian 9698922S001 turbo vacuum pump is a high vacuum pump from the Varian (now part of Agilent) Turbo-V 551 Navigator series, featuring a DN 160 ISO-K flange interface and a pumping speed of 550 L/s. It is a reliable and low maintenance turbo molecular pump.

5 Product Features

Adopting high-strength aluminum alloy integral machining impeller, equipped with 8-stage blades and 4-stage MacroTorr drag stage

Built in permanently lubricated ceramic ball bearings, installed on the vacuum side, no maintenance required

Equipped with Navigator intelligent controller, it can automatically optimize pump performance according to system requirements

Supports installation in any direction, can be water-cooled or air-cooled

Has high compression ratio for light gases and high front-end pressure tolerance

5 product parameters

Model: 9698922S001

Product Series: Turbo-V 551 Navigator

Inlet flange: DN 160 ISO-K

Front flange: KF 25 NW

Extraction speed (N2): 550 L/s

5 application areas

Electron microscopy analysis equipment such as scanning electron microscope (SEM)

Mass spectrometry analyzer

Ion beam system and ion implantation equipment

Surface analysis system

Glass Coating and Semiconductor Manufacturing

Overall, Varian 9698922S001 is a Turbo-V 551 Navigator series turbomolecular pump with a mature structure and stable performance. It is widely used in vacuum demanding fields such as electron microscopy, mass spectrometry analysis, and semiconductor manufacturing, and is a classic high vacuum pump model.

Varian 9698922S001涡轮真空泵  产品图片

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型号：Varian 9698922S001涡轮真空泵

质保：一年

成色：全新/二手

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