HP 5517B 激光头 PDF资料
1.产 品 资 料 介 绍：
HP 5517B 激光头
HP 5517B 激光头的核心特点如下：
双频氦氖（He-Ne）连续波激光器，专为激光干涉仪位移测量系统设计。
输出波长632.8nm（红光），线偏振光。
最小输出功率≥120μW，最大输出功率1mW。
光束直径6mm，光束高度79.5±1.0mm。
参考频率范围1.9~2.4MHz，选项H10为2.2~2.4MHz。
最大线性速度538mm/s。
需±15V直流供电，+15V最大2.2A，-15V最大0.02A。
预热功耗35W，工作功耗23W。
预热时间约90分钟，达到稳定输出后方可进行高精度测量。
真空波长稳定性1小时内±2ppb，生命周期内±20ppb。
功率稳定性与重复性均≤0.1%。
工作温度范围10℃~40℃。
重量约3.4kg，安装时后方需预留至少12cm空间。
适配基于VME和PC的激光干涉仪系统，广泛应用于机床定位、坐标测量机及半导体光刻设备校准。
HP 5517B 平均无故障时间超过50,000小时，可靠性高。
综上，HP 5517B 是一款面向高精度位移测量的专用激光头，性能稳定，适合计量与半导体制造领域使用
HP 5517B 激光头 英文介绍
HP 5517B laser head
The core features of the HP 5517B laser head are as follows:
A dual frequency He Ne continuous wave laser designed specifically for displacement measurement systems in laser interferometers.
Output wavelength 632.8nm (red light), linearly polarized light.
The minimum output power is ≥ 120 μ W, and the maximum output power is 1mW.
The beam diameter is 6mm and the beam height is 79.5 ± 1.0mm.
The reference frequency range is 1.9~2.4MHz, and option H10 is 2.2~2.4MHz.
The maximum linear velocity is 538mm/s.
Requires ± 15V DC power supply, with a maximum of 2.2A for+15V and 0.02A for -15V.
The preheating power consumption is 35W, and the operating power consumption is 23W.
The preheating time is about 90 minutes, and high-precision measurement can only be carried out after reaching stable output.
Vacuum wavelength stability within 1 hour ± 2pppb, lifecycle ± 20ppb.
Power stability and repeatability are both ≤ 0.1%.
The working temperature range is 10 ℃~40 ℃.
The weight is about 3.4kg, and at least 12cm of space needs to be reserved behind during installation.
Suitable for laser interferometer systems based on VME and PC, widely used in machine tool positioning, coordinate measuring machines, and semiconductor lithography equipment calibration.
The HP 5517B has an average time between failures of over 50000 hours and high reliability.
Overall, the HP 5517B is a specialized laser head designed for high-precision displacement measurement, with stable performance and suitable for use in the fields of metrology and semiconductor manufacturing
HP 5517B 激光头 产品图片
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