Daihen SVD-121-X1784 晶圆对准仪 PDF资料
1.产 品 资 料 介 绍：
Daihen SVD-121-X1784 晶圆对准仪产品特点
Daihen SVD-121-X1784 是大福为半导体制造设备配套的真空吸附式晶圆对准仪，用于在光刻、刻蚀、CVD/PVD等工艺前对晶圆进行高精度定位与角度校准。
产品特点：
大福原厂制造，属于OFH-4100系列产品线。
真空吸附保持方式，确保检测过程晶圆稳固。
支持多种尺寸晶圆，可通过指令切换适配。
可控制晶圆缺口和平面边的停止位置。
位置重复精度高，XY方向达±0.1mm，θ方向达±0.2°。
对准速度快，标准对准时间仅需1.8秒。
洁净度等级高，满足半导体产线环境要求。
主体重量轻，便于设备集成安装。
需供应真空源及24V直流电源。
支持石英晶圆等特殊材质（需选配对应型号）。
可选配晶圆边缘缺角与毛边检测功能。
与大福晶圆搬运机器人及控制器配套使用，系统兼容性好。
大福工业机器人技术积累，品质可靠。
综合来看，Daihen SVD-121-X1784 晶圆对准仪以高精度的定位能力、快速的真空吸附式对准效率和良好的洁净环境适应性，为半导体晶圆加工提供可靠的校准保障。
Daihen SVD-121-X1784 晶圆对准仪 英文介绍
Product Features of Daihen SVD-121-X1784 Wafer Alignment Instrument
Daihen SVD-121-X1784 is a vacuum adsorption wafer alignment instrument provided by Dafu for semiconductor manufacturing equipment. It is used for high-precision positioning and angle calibration of wafers before photolithography, etching, CVD/PVD and other processes.
Product Features:
Made by Dafu Original Factory, it belongs to the OFH-4100 series product line.
The vacuum adsorption holding method ensures the stability of the wafer during the detection process.
Supports multiple sizes of wafers and can be switched and adapted through commands.
Can control the stopping position of wafer notches and flat edges.
The position repeatability accuracy is high, reaching ± 0.1mm in the XY direction and ± 0.2 ° in the θ direction.
The alignment speed is fast, and the standard alignment time only takes 1.8 seconds.
High cleanliness level, meeting the environmental requirements of semiconductor production lines.
The main body is lightweight, making it easy to integrate and install equipment.
Vacuum source and 24V DC power supply are required.
Support special materials such as quartz wafers (corresponding models need to be selected).
Optional wafer edge corner and burr detection function.
Used in conjunction with the Dafu Crystal Circle handling robot and controller, the system has good compatibility.
Dafu Industrial Robot Technology has accumulated reliable quality.
Overall, the Daihen SVD-121-X1784 wafer alignment instrument provides reliable calibration support for semiconductor wafer processing with its high-precision positioning capability, fast vacuum adsorption alignment efficiency, and good adaptability to clean environments.
Daihen SVD-121-X1784 晶圆对准仪 产品展示
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