Yaskawa 0190-41805 晶圆预对准器 PDF资料 

1.产 品 资 料 介 绍：

Yaskawa 0190-41805 晶圆预对准器产品特点

Yaskawa 0190-41805 是安川电机为半导体制造设备配套的晶圆预对准器，用于在光刻、刻蚀、CVD/PVD等工艺前对晶圆进行高精度定位与角度校准。

产品特点：

1. 安川原厂制造，适配200mm及300mm晶圆。

2. 采用LED光源与CCD线阵传感器进行边缘检测。

3. 支持晶圆缺口和平面边识别。

4. 真空吸附夹持方式，检测过程稳固可靠。

5. 旋转角度校准精度高，圆心定位精准。

6. 单次对准时间短，满足高通量生产需求。

7. 内置AC伺服电机，配备高分辨率编码器。

8. 工作环境洁净度达ISO Class 1级。

9. 支持硅片及石英晶圆（需参数调整）。

10. 主体材质为阳极氧化铝及不锈钢，耐腐蚀性好。

11. 需供应CDA及真空源，确保正常运行。

12. 与安川晶圆搬运机器人及控制器配套使用。

13. 安川运动控制技术积累，品质可靠。

综合来看，Yaskawa 0190-41805 晶圆预对准器以高精度的定位能力、快速的对准效率和良好的洁净环境适应性，为半导体晶圆加工提供可靠的校准保障。

Yaskawa 0190-41805 晶圆预对准器  英文介绍

Yaskawa 0190-41805 Wafer Pre Alignment Device Product Features

Yaskawa 0190-41805 is a wafer pre aligner provided by Yaskawa Electric for semiconductor manufacturing equipment. It is used for high-precision positioning and angle calibration of wafers before photolithography, etching, CVD/PVD and other processes.

Product Features:

Yaskawa original factory manufacturing, compatible with 200mm and 300mm wafers.

Using LED light source and CCD linear sensor for edge detection.

Support wafer notch and planar edge recognition.

The vacuum adsorption clamping method ensures a stable and reliable detection process.

The rotation angle calibration accuracy is high, and the center positioning is precise.

Short single alignment time to meet high-throughput production requirements.

Built in AC servo motor, equipped with high-resolution encoder.

The cleanliness of the working environment reaches ISO Class 1 level.

Support silicon wafers and quartz wafers (parameter adjustment required).

The main material is anodized aluminum and stainless steel, with good corrosion resistance.

CDA and vacuum source need to be supplied to ensure normal operation.

Used in conjunction with Yaskawa wafer handling robots and controllers.

Accumulated Yaskawa motion control technology with reliable quality.

Overall, the Yaskawa 0190-41805 wafer pre aligner provides reliable calibration support for semiconductor wafer processing with high-precision positioning capability, fast alignment efficiency, and good adaptability to clean environments.

Yaskawa 0190-41805 晶圆预对准器  产品展示   

3.其他产品

FOXBORO P0904AK伺服驱动器
WOODWARD 8444-1067模拟量输出模块
PROSOFT 6K8 1037302通讯接口模块

4.其他英文产品

LAM 810-069751-114 Printed Circuit Board
BENTLY 3500/33-1-00 Relay Module
RELIANCE S-D4007 High Performance Digital Controller

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型号：Yaskawa 0190-41805 晶圆预对准器

质保：一年

成色：全新/二手

优势产品：ABB、GE、FOXBORO、TRICONEX、BENTLY、A-B、MOTOROLA、HONEYWELL 、SCHNEIDER 

                    WOODWARD、EMERSON、RELIANCE、DEIF、NI、XYVOM等

特点：主营产品各种模块/卡件，控制器，触摸屏，伺服驱动器。

应用行业：广泛应用于冶金、石油天然气、玻璃制造业、铝业、石油化工、煤矿、造纸印刷、纺织印染、机械、电子制造、汽车制造、烟草、塑胶机械、电力、水利、水处理/环保、市政工程、锅炉供暖、能源、输配电等

快递方式：国内顺丰、德邦、京东快递包邮，按照实际报价货期发货