Kyosan HPK10ZI-TE1 电源模块 PDF资料
1.产 品 资 料 介 绍：
AMAT 0010-19188 冷却升降机组件产品特点
- 集成博世伺服驱动，升降动作精准平稳
- 自带水冷冷却结构，快速稳定晶圆温度
- 陶瓷承载顶针，产尘少，保护晶圆表面
- 高精度定位，升降重复误差极小
- 适配标准半导体工艺腔体，直接替换原装件
- 密封结构适配真空腔体，不漏气
- 内置温度感应，实时监测冷却状态
- 升降速度可调，适配不同制程节拍
- 过载、限位双重机械电气防护
- 一体式装配模组，拆装维护便捷
- 低振动运行，避免晶圆偏移破损
- 耐腐蚀特种材质，适配制程化学环境
- 小型紧凑结构，节省腔体内安装空间
- 标准接线接口，对接设备控制系统
- 工业长寿命配件，降低产线停机频次结尾：AMAT 0010-19188 冷却升降机组件升降冷却一体化，适配薄膜沉积类半导体设备，工艺稳定性高。
AMAT 0010-19188 Cooling Elevator Component Product Features
Introduction: AMAT 0010-19188 is a semiconductor equipment specific wafer cooling and lifting integrated component, equipped with servo motors, temperature controlled and synchronized lifting.
Integrated Bosch servo drive, precise and smooth lifting action
Equipped with a water-cooling structure, it quickly stabilizes the wafer temperature
Ceramic bearing ejector pin, low dust production, protects the surface of the wafer
High precision positioning with minimal repetition error in lifting and lowering
Compatible with standard semiconductor process chambers, directly replacing original parts
Sealed structure suitable for vacuum chamber, no air leakage
Built in temperature sensing, real-time monitoring of cooling status
Adjustable lifting speed, suitable for different process rhythms
Overload and limit dual mechanical and electrical protection
Integrated assembly module, easy to disassemble and maintain
Low vibration operation to avoid wafer offset and damage
Corrosion resistant special material, suitable for process chemical environment
Small and compact structure, saving installation space inside the cavity
Standard wiring interface, compatible with equipment control system
Industrial long-life accessories reduce production line downtime frequency
Conclusion: AMAT 0010-19188 cooling elevator component integrates lifting and cooling, suitable for thin film deposition semiconductor equipment, with high process stability.
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