INFICON SPC-953-G1气体分析仪 PDF资料
1.产 品 资 料 介 绍：
INFICON SPC-953-G1 气体分析仪是用于半导体及真空工艺过程监测的四极质谱残余气体分析仪，其核心特点如下。
中间15条：
INFICON SPC-953-G1 采用四极质谱技术进行气体成分分析。
适用于半导体刻蚀、沉积等工艺腔室的实时气体监测。
用于验证真空完整性、鉴别痕量污染物及测量过程气体组分。
支持全天连续监测，保障产线稳定性。
配备封闭型长寿命离子源，可阻挡多数腐蚀性气体。
具备痕量污染物检测能力。
内置总压强规，用于过程压强监测与真空联锁。
可选配校准参考源，用于调谐与气体参数比对。
采用优化设计的取样系统。
质量数覆盖范围可选多种规格。
配备双灯丝，支持软件切换，提升可靠性。
检测灵敏度高。
扫描速度快。
采用一体式质谱腔体设计，支持烘烤。
INFICON SPC-953-G1 结构紧凑，适用于空间有限的设备安装场景。
结尾：
综上，INFICON SPC-953-G1 在检测灵敏度、连续运行可靠性及半导体工艺适配性方面均有良好表现，是真空工艺过程监控中较为可靠的气体分析组件。
The INFICON SPC-953-G1 gas analyzer is a quadrupole mass spectrometer residual gas analyzer used for monitoring semiconductor and vacuum process. Its core features are as follows.
Middle 15:
INFICON SPC-953-G1 uses quadrupole mass spectrometry technology for gas composition analysis.
Suitable for real-time gas monitoring in semiconductor etching, deposition and other process chambers.
Used for verifying vacuum integrity, identifying trace pollutants, and measuring process gas components.
Support continuous monitoring throughout the day to ensure the stability of the production line.
Equipped with a sealed long-life ion source, it can block most corrosive gases.
Capable of detecting trace pollutants.
Built in total pressure gauge, used for process pressure monitoring and vacuum interlocking.
Optional calibration reference source for tuning and gas parameter comparison.
Adopting an optimized sampling system design.
Multiple specifications are available for quality coverage.
Equipped with dual filaments, supports software switching, and enhances reliability.
High detection sensitivity.
Fast scanning speed.
Adopting an integrated mass spectrometry chamber design, supporting baking.
INFICON SPC-953-G1 has a compact structure and is suitable for equipment installation scenarios with limited space.
ending:
Overall, the INFICON SPC-953-G1 performs well in terms of detection sensitivity, continuous operation reliability, and semiconductor process adaptability, making it a reliable gas analysis component for vacuum process monitoring.
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